Si-Containing Reverse-Gradient Block Copolymer for Inorganic Pattern Amplification in EUV Lithography
Park, Yemin, Song, Seung Won, Hong, Jeehyun, Jang, Hanhwi, Lee, Gyu Rac, Kim, Geon Yeong, Jung, Yeon Sik
Published in ACS macro letters (20.08.2024)
Published in ACS macro letters (20.08.2024)
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Journal Article
Semiconductor Device and Method of Stabilizing Heat Spreader on Semiconductor Package
Hong, JeeHyun, Kim, HyunKyum, Jang, JiWon, Lee, KyuWon, Park, SooJung
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
Patent