Engineered High Resistivity Silicon Substrates in IPD Technology Used for Miniaturized sub-6 GHz Filters
Haapalinna, Atte, Holmberg, Heikki, Hujanen, Arto, Parkkinen, Katja, Rantakari, Pekka, Saijets, Jan, Vaha-Heikkia, Tauno
Published in 2021 51st European Microwave Conference (EuMC) (04.04.2022)
Published in 2021 51st European Microwave Conference (EuMC) (04.04.2022)
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