Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon
Beaucejour, Rossiny, Roebisch, Volker, Kochhar, Abhay, Moe, Craig G., Hodge, Michael David, Olsson, Roy H.
Published in Journal of microelectromechanical systems (01.08.2022)
Published in Journal of microelectromechanical systems (01.08.2022)
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