SIMS analyses of ultra-low-energy B ion implants in Si: Evaluation of profile shape and dose accuracy
Magee, C.W., Hockett, R.S., Büyüklimanli, T.H., Abdelrehim, I., Marino, J.W.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2007)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2007)
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Journal Article
SIMS study of Na in CIGS and impurities in CdTe/CdS
Wang, L., Wang, A., Hockett, R.S.
Published in 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) (01.06.2009)
Published in 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) (01.06.2009)
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Conference Proceeding
SIMS quantification of low concentration of nitrogen doped in silicon crystals
Fujiyama, N., Karen, A., Sams, D.B., Hockett, R.S., Shingu, K., Inoue, N.
Published in Applied surface science (15.01.2003)
Published in Applied surface science (15.01.2003)
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Journal Article
Effects of cleaning techniques on residual contamination in SIMOX
Anc, M.J., Cordts, B.F., Dolan, R.P., Hockett, R.S., Sandow, P.M.
Published in 1991 IEEE International SOI Conference Proceedings (1991)
Published in 1991 IEEE International SOI Conference Proceedings (1991)
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Conference Proceeding