A MEMS-based programmable diffraction grating for optical holography in the spectral domain
Butler, M.A., Deutsch, E.R., Senturia, S.D., Sinclair, M.B., Sweatt, W.C., Youngner, D.W., Hocker, G.B.
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
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Conference Proceeding
A large-Travel vertical planar actuator with improved stability
Deutsch, E.R., Bardhan, J.P., Senturia, S.D., Hocker, G.B., Youngner, D.W., Sinclair, M.B., Butler, M.A.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
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Conference Proceeding
A MEMS-based programmable diffraction grating for optical holography in the spectral domain
Butler, M.A., Senturia, S.D., Deutsch, E.R., Sinclair, M.B., Sweatt, W.C., Youngner, D.W., Hocker, G.B.
Published in 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) (2001)
Published in 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) (2001)
Get full text
Conference Proceeding