Optimization of n-junction through ion beam shadowing and buffering effect by tilt implantation with rotation for improving the retention time
Nam-Sung Kim, Il-Gweon Kim, Seung-Han Ok, Deng-Chan Kim, Seok-Jin Choi, Jun-Ho Choi, Ho-Yup Kwen, Dae-Young Park, Ji-Bum Kim
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
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