Method and system for detecting tool errors to stop a process recipe for a single chamber
Chen, Chun-Hsiang, Lai, Yun-Sen, Ho, Keng-Hsien, Tseng, Chien-Lung, Kuo, Hung-Chih
Year of Publication 15.03.2011
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Year of Publication 15.03.2011
Patent
Method and system for detecting tool errors to stop a process recipe for a single chamber
CHEN CHUN-HSIANG, LAI YUN-SEN, HO KENG-HSIEN, KUO HUNGIH, TSENG CHIEN-LUNG
Year of Publication 15.03.2011
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Year of Publication 15.03.2011
Patent
METHOD AND SYSTEM FOR DETECTING TOOL ERRORS TO STOP A PROCESS RECIPE FOR A SINGLE CHAMBER
CHEN CHUN-HSIANG, LAI YUN-SEN, HO KENG-HSIEN, KUO HUNGIH, TSENG CHIEN-LUNG
Year of Publication 08.10.2009
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Year of Publication 08.10.2009
Patent
Method and system for detecting tool errors to stop a process recipe for a single chamber
CHEN, CHUN HSIANG, TSENG, CHIEN LUNG, LAI, YUN SEN, KUO, HUNG CHIH, HO, KENG HSIEN
Year of Publication 21.12.2012
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Year of Publication 21.12.2012
Patent
Method and system for detecting tool errors to stop a process recipe for a single chamber
HO, KENG-HSIEN, TSENG, CHIEN-LUNG, CHEN, CHUN-HSIANG, KUO, HUNGIH, LAI, YUN-SEN
Year of Publication 16.10.2009
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Year of Publication 16.10.2009
Patent