Implant after through-silicon via (TSV) etch to getter mobile ions
Greene, Brian J, Graves-Abe, Troy L, Collins, Christopher, Hannon, Robert, Ho, Herbert L, Farooq, Mukta G, Kothandaraman, Chandrasekharan
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Year of Publication 01.01.2019
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DT capacitor with silicide outer electrode and/or compressive stress layer, and related methods
Breil Nicolas L, Donaton Ricardo A, Kang Dong Hun, Krishnan Rishikesh, Ho Herbert L
Year of Publication 16.05.2017
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Year of Publication 16.05.2017
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DT capacitor with silicide outer electrode and/or compressive stress layer, and related methods
Breil Nicolas L, Donaton Ricardo A, Kang Dong Hun, Krishnan Rishikesh, Ho Herbert L
Year of Publication 15.11.2016
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Year of Publication 15.11.2016
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Reaction mechanism of cobalt with silicon dioxide
Nguyen, Tue, Ho, Herbert L., Kotecki, David E., Nguyen, Tai D.
Published in Journal of applied physics (15.01.1996)
Published in Journal of applied physics (15.01.1996)
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Journal Article
Dynamic random access memory cell with self-aligned strap
Vega Reinaldo A, Cheng Kangguo, Ramachandran Ravikumar, Barth, Jr. John E, Rim Kern, Ho Herbert L, Khakifirooz Ali
Year of Publication 15.08.2017
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Year of Publication 15.08.2017
Patent
IMPLANT AFTER THROUGH-SILICON VIA (TSV) ETCH TO GETTER MOBILE IONS
Collins Christopher, Graves-Abe Troy L, Kothandaraman Chandrasekharan, Greene Brian J, Farooq Mukta G, Hannon Robert, Ho Herbert L
Year of Publication 13.07.2017
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Year of Publication 13.07.2017
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Trench metal insulator metal capacitor with oxygen gettering layer
Kang Donghun, Chudzik Michael P, Narayanan Vijay, Cartier Eduard A, Krishnan Rishikesh, Ando Takashi, Rim Kern, Dasgupta Aritra, Ho Herbert L
Year of Publication 06.03.2018
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Year of Publication 06.03.2018
Patent
Dynamic random access memory cell with self-aligned strap
Vega Reinaldo A, Cheng Kangguo, Ramachandran Ravikumar, Barth, Jr. John E, Rim Kern, Ho Herbert L, Khakifirooz Ali
Year of Publication 07.02.2017
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Year of Publication 07.02.2017
Patent
TRENCH METAL INSULATOR METAL CAPACITOR WITH OXYGEN GETTERING LAYER
Kang Donghun, Chudzik Michael P, Narayanan Vijay, Cartier Eduard A, Krishnan Rishikesh, Ando Takashi, Rim Kern, Dasgupta Aritra, Ho Herbert L
Year of Publication 31.08.2017
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Year of Publication 31.08.2017
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Dummy gate structure for electrical isolation of a fin DRAM
Tian Kehan, Vega Reinaldo A, Doris Bruce B, Cheng Kangguo, Khan Babar A, Barth, Jr. John E, Rim Kern, Ho Herbert L, Khakifirooz Ali, Ponoth Shom
Year of Publication 22.08.2017
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Year of Publication 22.08.2017
Patent
Trench metal-insulator-metal capacitor with oxygen gettering layer
Kang Donghun, Chudzik Michael P, Narayanan Vijay, Cartier Eduard A, Krishnan Rishikesh, Ando Takashi, Rim Kern, Dasgupta Aritra, Ho Herbert L
Year of Publication 16.05.2017
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Year of Publication 16.05.2017
Patent