Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales
Misumi, Ichiko, Gonda, Satoshi, Huang, Qiangxian, Keem, Taeho, Kurosawa, Tomizo, Fujii, Akihiro, Hisata, Nahoko, Yamagishi, Takeshi, Fujimoto, Hirohisa, Enjoji, Ken, Aya, Sunao, Sumitani, Hiroaki
Published in Measurement science & technology (01.10.2005)
Published in Measurement science & technology (01.10.2005)
Get full text
Journal Article
ULTRASONIC MICROSCOPE
ENDO, TOMIO, OLYMPUS DAI-1-ISHIKAWA RYO, HISATA, NAHOKO, MAISON DE NORD BARRMOU HACHIOUJI
Year of Publication 28.12.1994
Get full text
Year of Publication 28.12.1994
Patent
ULTRASONIC MICROSCOPE
ENDO, TOMIO, OLYMPUS DAI-1-ISHIKAWA RYO, HISATA, NAHOKO, MAISON DE NORD BARRMOU HACHIOUJI
Year of Publication 05.05.1993
Get full text
Year of Publication 05.05.1993
Patent