How UV selectable illumination inspection tool and methodologies can accelerate learning curve of advanced technologies
Turines, V., Archambault, C., Hinschberger, B., Rouchouze, E., Bos-Lorenzo, S., Moreau, O.
Published in Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI (2003)
Published in Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI (2003)
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Conference Proceeding
Inline Defect Root Cause Analysis of Cu CMP Shorts Using Dual Beam FIB
Porat, R., Eshwege, H., Valfer, E., David, D., Pepper, D., Cricchio, F., Hinschberger, B., Kolar, D.
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
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Conference Proceeding
A functional 0.69 /spl mu/m/sup 2/ embedded 6T-SRAM bit cell for 65 nm CMOS platform
Arnaud, F., Boeuf, F., Salvetti, F., Lenoble, D., Wacquant, F., Regnier, C., Morin, P., Emonet, N., Denis, E., Oberlin, J.C., Ceccarelli, D., Vannier, P., Imbert, G., Sicard, A., Perrot, C., Belmont, O., Guilmeau, I., Sassoulas, P.O., Delmedico, S., Palla, R., Leverd, F., Beverina, A., DeJonghe, V., Broekaart, M., Pain, L., Todeschini, J., Charpin, M., Laplanche, Y., Neira, D., Vachellerie, V., Borot, B., Devoivre, T., Bicais, N., Hinschberger, B., Pantel, R., Revil, N., Parthasarathy, C., Planes, N., Brut, H., Farkas, J., Uginet, J., Stolk, P., Woo, M.
Published in 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) (2003)
Published in 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) (2003)
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Conference Proceeding