Fundamental understanding of chemical processes in extreme ultraviolet resist materials
Kostko, Oleg, Xu, Bo, Ahmed, Musahid, Slaughter, Daniel S, Ogletree, D Frank, Closser, Kristina D, Prendergast, David G, Naulleau, Patrick, Olynick, Deirdre L, Ashby, Paul D, Liu, Yi, Hinsberg, William D, Wallraff, Gregory M
Published in The Journal of chemical physics (21.10.2018)
Published in The Journal of chemical physics (21.10.2018)
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Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist
Cheng, Joy Y, Sanders, Daniel P, Truong, Hoa D, Harrer, Stefan, Friz, Alexander, Holmes, Steven, Colburn, Matthew, Hinsberg, William D
Published in ACS nano (24.08.2010)
Published in ACS nano (24.08.2010)
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Integration of Directed Self-Assembly with 193 nm Lithography
Sanders, Daniel P., Cheng, Joy, Rettner, Charles T., Hinsberg, William D., Kim, Ho-Cheol, Trung, Hoa, Fritz, Alexander, Harrer, Steven, Holmes, Steven, Colburn, Matthew
Published in Journal of Photopolymer Science and Technology (01.01.2010)
Published in Journal of Photopolymer Science and Technology (01.01.2010)
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Journal Article
The Mechanism of Phenolic Polymer Dissolution: A New Perspective
Tsiartas, Pavlos C, Flanagin, Lewis W, Henderson, Clifford L, Hinsberg, William D, Sanchez, Isaac C, Bonnecaze, Roger T, Willson, C. Grant
Published in Macromolecules (11.08.1997)
Published in Macromolecules (11.08.1997)
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Mechanism of Phenolic Polymer Dissolution: Importance of Acid−Base Equilibria
Flanagin, Lewis W, McAdams, Christopher L, Hinsberg, William D, Sanchez, Isaac C, Willson, C. Grant
Published in Macromolecules (10.08.1999)
Published in Macromolecules (10.08.1999)
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Journal Article
Oriented Mesoporous Organosilicate Thin Films
Freer, Erik M, Krupp, Leslie E, Hinsberg, William D, Rice, Philip M, Hedrick, James L, Cha, Jennifer N, Miller, Robert D, Kim, Ho-Cheol
Published in Nano letters (01.10.2005)
Published in Nano letters (01.10.2005)
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Journal Article
Design of Protective Topcoats for Immersion Lithography
Allen, Robert D., Brock, Phillip J., Sundberg, Linda, Larson, Carl E., Wallraff, Gregory M., Hinsberg, William D., Meute, Jeff, Shimokawa, Tsutomu, Chiba, Takashi, Slezak, Mark
Published in Journal of Photopolymer Science and Technology (01.01.2005)
Published in Journal of Photopolymer Science and Technology (01.01.2005)
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Journal Article
Manipulation of Surface Properties by Patterning of Covalently Bound Polymer Brushes
Husemann, Marc, Morrison, Michael, Benoit, Didier, Frommer, Jane, Mate, C. Mathew, Hinsberg, William D, Hedrick, James L, Hawker, Craig J
Published in Journal of the American Chemical Society (01.03.2000)
Published in Journal of the American Chemical Society (01.03.2000)
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Chemical Imaging of Photoresists with Coherent Anti-Stokes Raman Scattering (CARS) Microscopy
Potma, Eric O, Xie, X. Sunney, Muntean, Ligia, Preusser, Jan, Jones, David, Ye, Jun, Leone, Stephen R, Hinsberg, William D, Schade, Wolfgang
Published in The journal of physical chemistry. B (29.01.2004)
Published in The journal of physical chemistry. B (29.01.2004)
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APPROACH TOWARD ENVIRONMENTAL STABILIZATION OF CHEMICAL AMPLIFICATION RESISTS
ITO, Hiroshi, ENGLAND, William P., SOORIYAKUMARAN, R., CLECAK, Nicholas J., BREYTA, Gregory, HINSBERG, William D., LEE, Hoosung, YOON, Do Y.
Published in Journal of Photopolymer Science and Technology (1993)
Published in Journal of Photopolymer Science and Technology (1993)
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Water Vapor Uptake in Photolithographic Polymers Observed by Infrared Near-Field Scanning Optical Microscopy in a Controlled Environment
McDonough, Laurie A, Dragnea, Bogdan, Preusser, Jan, Leone, Stephen R, Hinsberg, William D
Published in The journal of physical chemistry. B (29.05.2003)
Published in The journal of physical chemistry. B (29.05.2003)
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Journal Article
Selective Sorption of Nanoporous Poly(methyl silsesquioxane)
Kim, Ho-Cheol, Wilds, Jason B, Hinsberg, William D, Johnson, Larry R, Volksen, Willi, Magbitang, Teddie, Lee, Victor Y, Hedrick, James L, Hawker, Craig J, Miller, Robert D, Huang, Elbert
Published in Chemistry of materials (01.11.2002)
Published in Chemistry of materials (01.11.2002)
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Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
Dragnea, Bogdan, Preusser, Jan, Szarko, Jodi M, McDonough, Laurie A, Leone, Stephen R, Hinsberg, William D
Published in Applied surface science (15.05.2001)
Published in Applied surface science (15.05.2001)
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