Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror
Kundu, S. K., Hikita, A., Kumagai, S., Sasaki, M.
Published in Journal of lightwave technology (15.05.2012)
Published in Journal of lightwave technology (15.05.2012)
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Journal Article
Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing
Kumagai, Shinya, Hikita, Akiyoshi, Iwamoto, Takuya, Tomikawa, Takashi, Hori, Masaru, Sasaki, Minoru
Published in Japanese Journal of Applied Physics (01.01.2012)
Published in Japanese Journal of Applied Physics (01.01.2012)
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Journal Article
Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing
Kumagai, Shinya, Hikita, Akiyoshi, Iwamoto, Takuya, Tomikawa, Takashi, Hori, Masaru, Sasaki, Minoru
Published in Japanese Journal of Applied Physics (01.01.2012)
Published in Japanese Journal of Applied Physics (01.01.2012)
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Journal Article
Dynamic deformation of stretched membrane in drum-type micromirror
Kundu, S. K., Hikita, A., Kumagai, S., Sasaki, M.
Published in 2011 International Symposium on Micro-NanoMechatronics and Human Science (01.11.2011)
Published in 2011 International Symposium on Micro-NanoMechatronics and Human Science (01.11.2011)
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Conference Proceeding