High-Field Transport and Statistical Variability of Nanosheet Oxide Semiconductor FETs With Channel Length Scaling
Huang, Xingyu, Hikake, Kaito, Kim, Sung-Hun, Sakai, Kota, Li, Zhuo, Mizutani, Tomoko, Saraya, Takuya, Hiramoto, Toshiro, Takahashi, Takanori, Uenuma, Mutsunori, Uraoka, Yukiharu, Kobayashi, Masaharu
Published in IEEE transactions on electron devices (17.10.2024)
Published in IEEE transactions on electron devices (17.10.2024)
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Journal Article
A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel for 3-D Integrated Devices
Hikake, Kaito, Li, Zhuo, Hao, Junxiang, Pandy, Chitra, Saraya, Takuya, Hiramoto, Toshiro, Takahashi, Takanori, Uenuma, Mutsunori, Uraoka, Yukiharu, Kobayashi, Masaharu
Published in IEEE transactions on electron devices (01.04.2024)
Published in IEEE transactions on electron devices (01.04.2024)
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Journal Article
Scaling Potential of Nanosheet Oxide Semiconductor FETs for Monolithic 3D Integration-ALD Material Engineering, High-Field Transport, Statistical Variability
Hikake, Kaito, Huang, Xingyu, Kim, Sung-Hun, Sakai, Kota, Li, Zhuo, Mizutani, Tomoko, Saraya, Takuya, Hiramoto, Toshiro, Takahashi, Takanori, Uenuma, Mutsunori, Uraoka, Yukiharu, Kobayashi, Masaharu
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
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Conference Proceeding
Performance and Reliability of Nanosheet Oxide Semiconductor FETs with ALD-Grown InGaO for 3D Integration (Invited)
Kobayashi, Masaharu, Hikake, Kaito, Li, Zhuo, Hao, Junxiang, Pandy, Chitra, Saraya, Takuya, Hiramoto, Toshiro, Takahashi, Takanori, Uenuma, Mutsunori, Uraoka, Yukiharu
Published in 2024 IEEE International Reliability Physics Symposium (IRPS) (14.04.2024)
Published in 2024 IEEE International Reliability Physics Symposium (IRPS) (14.04.2024)
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Conference Proceeding
A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel and InSnOx Electrode with Normally-off Operation, High Mobility and Reliability for 3D Integrated Devices
Hikake, Kaito, Li, Zhuo, Hao, Junxiang, Pandy, Chitra, Saraya, Takuya, Hiramoto, Toshiro, Takahashi, Takanori, Uenuma, Mutsunori, Uraoka, Yukiharu, Kobayashi, Masaharu
Published in 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (11.06.2023)
Published in 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (11.06.2023)
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Conference Proceeding
A Nanosheet Oxide Semiconductor FET Using ALD InZnOx Channel
Kim, Sung-Hun, Hikake, Kaito, Li, Zhuo, Saraya, Takuya, Hiramoto, Toshiro, Kobayashi, Masaharu
Published in 2024 IEEE Silicon Nanoelectronics Workshop (SNW) (15.06.2024)
Published in 2024 IEEE Silicon Nanoelectronics Workshop (SNW) (15.06.2024)
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Conference Proceeding