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Electrical Properties of RF-Sputtered FeSix Films and Their Relationship to Phase Transition from ε-FeSi to β-FeSi2 during Post-Annealing
by
Hiehata
,
Keiichiro
,
Kawabata, Naoki
,
Nakamura, Kazuhiro
Published in
E-journal of surface science and nanotechnology
(01.01.2012)
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Electrical Properties of RF-Sputtered FeSix Films and Their Relationship to Phase Transition from Im-FeSi to I2-FeSi2 during Post-Annealing
by
Hiehata
,
Keiichiro
,
Kawabata, Naoki
,
Nakamura, Kazuhiro
Published in
E-journal of surface science and nanotechnology
(01.01.2012)
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chemistry
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silicides
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annealing
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deposition
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disilicides
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four-point probe conductivity measurement
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intermetallics
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