Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
Groven, Benjamin, Heyne, Markus, Nalin Mehta, Ankit, Bender, Hugo, Nuytten, Thomas, Meersschaut, Johan, Conard, Thierry, Verdonck, Patrick, Van Elshocht, Sven, Vandervorst, Wilfried, De Gendt, Stefan, Heyns, Marc, Radu, Iuliana, Caymax, Matty, Delabie, Annelies
Published in Chemistry of materials (11.04.2017)
Published in Chemistry of materials (11.04.2017)
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Journal Article
Two-dimensional WS2 nanoribbon deposition by conversion of pre-patterned amorphous silicon
Heyne, Markus H, de Marneffe, Jean-François, Delabie, Annelies, Caymax, Matty, Neyts, Erik C, Radu, Iuliana, Huyghebaert, Cedric, De Gendt, Stefan
Published in Nanotechnology (27.01.2017)
Published in Nanotechnology (27.01.2017)
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Journal Article
The conversion mechanism of amorphous silicon to stoichiometric WS2
Heyne, Markus H, de Marneffe, Jean-François, Nuytten, Thomas, Meersschaut, Johan, Conard, Thierry, Caymax, Matty, Radu, Iuliana, Delabie, Annelies, Neyts, Erik C, De Gendt, Stefan
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
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Journal Article
Controlled Sulfurization Process for the Synthesis of Large Area MoS2 Films and MoS2/WS2 Heterostructures
Chiappe, Daniele, Asselberghs, Inge, Sutar, Surajit, Iacovo, Serena, Afanas'ev, Valeri, Stesmans, Andre, Balaji, Yashwanth, Peters, Lisanne, Heyne, Markus, Mannarino, Manuel, Vandervorst, Wilfried, Sayan, Safak, Huyghebaert, Cedric, Caymax, Matty, Heyns, Marc, De Gendt, Stefan, Radu, Iuliana, Thean, Aaron
Published in Advanced materials interfaces (23.02.2016)
Published in Advanced materials interfaces (23.02.2016)
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Journal Article
A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Heyne, Markus H, Marinov, Daniil, Braithwaite, Nicholas, Goodyear, Andy, de Marneffe, Jean-François, Cooke, Mike, Radu, Iuliana, Neyts, Erik C, De Gendt, Stefan
Published in 2d materials (16.05.2019)
Published in 2d materials (16.05.2019)
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Journal Article
Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Marinov, Daniil, de Marneffe, Jean-François, Smets, Quentin, Arutchelvan, Goutham, Bal, Kristof M., Voronina, Ekaterina, Rakhimova, Tatyana, Mankelevich, Yuri, El Kazzi, Salim, Nalin Mehta, Ankit, Wyndaele, Pieter-Jan, Heyne, Markus Hartmut, Zhang, Jianran, With, Patrick C., Banerjee, Sreetama, Neyts, Erik C., Asselberghs, Inge, Lin, Dennis, De Gendt, Stefan
Published in NPJ 2D materials and applications (28.01.2021)
Published in NPJ 2D materials and applications (28.01.2021)
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Journal Article
Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach
Zhang, Liping, de Marneffe, Jean-Francois, Heyne, Markus H., Naumov, Sergej, Sun, Yiting, Zotovich, Alexey, el Otell, Ziad, Vajda, Felim, De Gendt, Stefan, Baklanov, Mikhail R.
Published in ECS journal of solid state science and technology (01.01.2015)
Published in ECS journal of solid state science and technology (01.01.2015)
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Journal Article
Highly efficient and stable MoS2 FETs with reversible n-doping using a dehydrated poly(vinyl-alcohol) coating
Lockhart de la Rosa, César J, Nourbakhsh, Amirhasan, Heyne, Markus, Asselberghs, Inge, Huyghebaert, Cedric, Radu, Iuliana, Heyns, Marc, De Gendt, Stefan
Published in Nanoscale (07.01.2017)
Published in Nanoscale (07.01.2017)
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Journal Article
Two-dimensional WS 2 nanoribbon deposition by conversion of pre-patterned amorphous silicon
Heyne, Markus H, de Marneffe, Jean-François, Delabie, Annelies, Caymax, Matty, Neyts, Erik C, Radu, Iuliana, Huyghebaert, Cedric, De Gendt, Stefan
Published in Nanotechnology (27.01.2017)
Published in Nanotechnology (27.01.2017)
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Journal Article
Highly efficient and stable MoS 2 FETs with reversible n-doping using a dehydrated poly(vinyl-alcohol) coating
Lockhart de la Rosa, César J, Nourbakhsh, Amirhasan, Heyne, Markus, Asselberghs, Inge, Huyghebaert, Cedric, Radu, Iuliana, Heyns, Marc, De Gendt, Stefan
Published in Nanoscale (07.01.2017)
Published in Nanoscale (07.01.2017)
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Journal Article
Highly efficient and stable MoS2 FETs with reversible n-doping using a dehydrated poly(vinyl-alcohol) coatingElectronic supplementary information (ESI) available: Electrical characterization of a PVA film, current behaviour of PVA-doped MoS2 FETs under humid conditions, photoluminescence of MoS2 before and after doping, spectroscopy characterization of PVA films and analysis of the MoS2 film thickness, environment and passivation effects on the device. See DOI: 10.1039/c6nr06980k
Lockhart de la Rosa, César J, Nourbakhsh, Amirhasan, Heyne, Markus, Asselberghs, Inge, Huyghebaert, Cedric, Radu, Iuliana, Heyns, Marc, De Gendt, Stefan
Year of Publication 22.12.2016
Year of Publication 22.12.2016
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Journal Article
Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS 2 from WF 6 , H 2 Plasma, and H 2 S
Groven, Benjamin, Heyne, Markus, Nalin Mehta, Ankit, Bender, Hugo, Nuytten, Thomas, Meersschaut, Johan, Conard, Thierry, Verdonck, Patrick, Van Elshocht, Sven, Vandervorst, Wilfried, De Gendt, Stefan, Heyns, Marc, Radu, Iuliana, Caymax, Matty, Delabie, Annelies
Published in Chemistry of materials (11.04.2017)
Published in Chemistry of materials (11.04.2017)
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Journal Article
The conversion mechanism of amorphous silicon to stoichiometric WS 2
Heyne, Markus H., de Marneffe, Jean-François, Nuytten, Thomas, Meersschaut, Johan, Conard, Thierry, Caymax, Matty, Radu, Iuliana, Delabie, Annelies, Neyts, Erik C., De Gendt, Stefan
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
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Journal Article
Controlled Sulfurization Process for the Synthesis of Large Area MoS 2 Films and MoS 2 /WS 2 Heterostructures
Chiappe, Daniele, Asselberghs, Inge, Sutar, Surajit, Iacovo, Serena, Afanas'ev, Valeri, Stesmans, Andre, Balaji, Yashwanth, Peters, Lisanne, Heyne, Markus, Mannarino, Manuel, Vandervorst, Wilfried, Sayan, Safak, Huyghebaert, Cedric, Caymax, Matty, Heyns, Marc, De Gendt, Stefan, Radu, Iuliana, Thean, Aaron
Published in Advanced materials interfaces (01.02.2016)
Published in Advanced materials interfaces (01.02.2016)
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Journal Article
Controlled Sulfurization Process for the Synthesis of Large Area MoS sub(2) Films and MoS sub(2)/WS sub(2) Heterostructures
Chiappe, Daniele, Asselberghs, Inge, Sutar, Surajit, Iacovo, Serena, Afanas'ev, Valeri, Stesmans, Andre, Balaji, Yashwanth, Peters, Lisanne, Heyne, Markus, Mannarino, Manuel, Vandervorst, Wilfried, Sayan, Safak, Huyghebaert, Cedric, Caymax, Matty, Heyns, Marc, De Gendt, Stefan, Radu, Iuliana, Thean, Aaron
Published in Advanced materials interfaces (01.02.2016)
Published in Advanced materials interfaces (01.02.2016)
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Journal Article
METHOD OF PROCESSING AN OPTOELECTRONIC DEVICE AND OPTOELECTRONIC DEVICE
MUELLER, Vesna, MEYER, Tobias, STEINER, André, HOEPPEL, Lutz, HEYNE, Markus
Year of Publication 15.06.2023
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Year of Publication 15.06.2023
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