Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
Stine, B.E., Ouma, D.O., Divecha, R.R., Boning, D.S., Chung, J.E., Hetherington, D.L., Harwoo, C.R., Nakagawa, O.S., Soo-Young Oh
Published in IEEE transactions on semiconductor manufacturing (01.02.1998)
Published in IEEE transactions on semiconductor manufacturing (01.02.1998)
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Journal Article
Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms
Stein, David J., Cecchi, Joseph L., Hetherington, Dale L.
Published in Journal of materials research (01.09.1999)
Published in Journal of materials research (01.09.1999)
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Journal Article
SOI-enabled MEMS processes lead to novel mechanical, optical, and atomic physics devices
Herrera, G.V., Bauer, T., Blain, M.G., Dodd, P.E., Dondero, R., Garcia, E.J., Galambos, P.C., Hetherington, D.L., Hudgens, J.J., McCormick, F.B., Nielson, G.N., Nordquist, C.D., Okandan, M., Olsson, R.H., Platzbecker, M.R., Resnick, P.J., Shul, R.J., Shaw, M.J., Sullivan, C.T., Watts, M.R.
Published in 2008 IEEE International SOI Conference (01.10.2008)
Published in 2008 IEEE International SOI Conference (01.10.2008)
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Conference Proceeding
Front end of line integration of high density, electrically isolated, metallized through silicon vias
Bauer, T.M., Shinde, S.L., Massad, J.E., Hetherington, D.L.
Published in 2009 59th Electronic Components and Technology Conference (01.05.2009)
Published in 2009 59th Electronic Components and Technology Conference (01.05.2009)
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Conference Proceeding
Radiation-induced defects in chemical-mechanical polished MOS oxides
Shaneyfelt, M.R., Warren, W.L., Hetherington, D.L., Winokur, P.S., Reber, R.A.
Published in IEEE transactions on nuclear science (01.12.1995)
Published in IEEE transactions on nuclear science (01.12.1995)
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Journal Article
Defect centers in chemical-mechanical polished MOS oxides
Shaneyfelt, M.R., Warren, W.L., Hetherington, D.L., Timon, R.P., Resnick, P.J., Winokur, P.S.
Published in Microelectronic engineering (01.06.1995)
Published in Microelectronic engineering (01.06.1995)
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Journal Article
A three-dimensional silicon photonic crystal
Lin, S.Y., Fleming, J.G., Hetherington, D.L., Smith, B.K., Biswas, R., Ho, K.M., Sigalas, M.M., Zubrzycki, W.
Published in Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243) (1998)
Published in Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243) (1998)
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Conference Proceeding
A portable low-power hydrogen gas sensor system for wide range H/sub 2/ detection
Hetherington, D.L., Grant, R.W., Hughes, K.L., Corbett, W.T., Hughes, R.C., Rodriguez, J.L., McWhorter, P.J.
Published in Proceedings of 1994 37th Midwest Symposium on Circuits and Systems (1994)
Published in Proceedings of 1994 37th Midwest Symposium on Circuits and Systems (1994)
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Conference Proceeding