A three-dimensional photonic crystal operating at infrared wavelengths
Lin, S. Y, Fleming, J. G, Hetherington, D. L, Smith, B. K, Biswas, R, Ho, K. M, Sigalas, M. M, Zubrzycki, W, Kurtz, S. R, Bur, Jim
Published in Nature (London) (16.07.1998)
Published in Nature (London) (16.07.1998)
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Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
Stine, B.E., Ouma, D.O., Divecha, R.R., Boning, D.S., Chung, J.E., Hetherington, D.L., Harwoo, C.R., Nakagawa, O.S., Soo-Young Oh
Published in IEEE transactions on semiconductor manufacturing (01.02.1998)
Published in IEEE transactions on semiconductor manufacturing (01.02.1998)
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Journal Article
Radiation-induced defects in chemical-mechanical polished MOS oxides
Shaneyfelt, M.R., Warren, W.L., Hetherington, D.L., Winokur, P.S., Reber, R.A.
Published in IEEE transactions on nuclear science (01.12.1995)
Published in IEEE transactions on nuclear science (01.12.1995)
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Journal Article
Defect centers in chemical-mechanical polished MOS oxides
Shaneyfelt, M.R., Warren, W.L., Hetherington, D.L., Timon, R.P., Resnick, P.J., Winokur, P.S.
Published in Microelectronic engineering (01.06.1995)
Published in Microelectronic engineering (01.06.1995)
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Journal Article
SOI-enabled MEMS processes lead to novel mechanical, optical, and atomic physics devices
Herrera, G.V., Bauer, T., Blain, M.G., Dodd, P.E., Dondero, R., Garcia, E.J., Galambos, P.C., Hetherington, D.L., Hudgens, J.J., McCormick, F.B., Nielson, G.N., Nordquist, C.D., Okandan, M., Olsson, R.H., Platzbecker, M.R., Resnick, P.J., Shul, R.J., Shaw, M.J., Sullivan, C.T., Watts, M.R.
Published in 2008 IEEE International SOI Conference (01.10.2008)
Published in 2008 IEEE International SOI Conference (01.10.2008)
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Conference Proceeding
Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms
Stein, David J., Cecchi, Joseph L., Hetherington, Dale L.
Published in Journal of materials research (01.09.1999)
Published in Journal of materials research (01.09.1999)
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Journal Article
Dependence of Oxide Pattern Density Variation on Motor Current Endpoint Detection during Shallow Trench Isolation Chemical Mechanical Planarization
Sorooshian, Jamshid, Philipossian, Ara, Stein, David J., Timon, Robert P., Hetherington, Dale L.
Published in Japanese Journal of Applied Physics (01.03.2005)
Published in Japanese Journal of Applied Physics (01.03.2005)
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