Surface reaction kinetics of CH3 in CH4 RF discharge studied by time-resolved threshold ionization mass spectrometry
SHIRATANI, M, JOLLY, J, VIDELOT, H, PERRIN, J
Published in Japanese journal of applied physics (01.07.1997)
Published in Japanese journal of applied physics (01.07.1997)
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Conference Proceeding
Surface Reaction Kinetics of CH 3 in CH 4 RF Discharge Studied by Time-Resolved Threshold Ionization Mass Spectrometry
Masaharu Shiratani, Masaharu Shiratani, Jacques Jolly, Jacques Jolly, Hervé Videlot, Hervé Videlot, Jérôme Perrin, Jérôme Perrin
Published in Japanese Journal of Applied Physics (01.07.1997)
Published in Japanese Journal of Applied Physics (01.07.1997)
Get full text
Journal Article