c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes
Ababneh, A., Alsumady, M., Seidel, H., Manzaneque, T., Hernando-García, J., Sánchez-Rojas, J.L., Bittner, A., Schmid, U.
Published in Applied surface science (15.10.2012)
Published in Applied surface science (15.10.2012)
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Journal Article
Design and characterization of AlN-based in-plane microplate resonators
Ruiz-Díez, V, Manzaneque, T, Hernando-García, J, Ababneh, A, Kucera, M, Schmid, U, Seidel, H, Sánchez-Rojas, J L
Published in Journal of micromechanics and microengineering (01.07.2013)
Published in Journal of micromechanics and microengineering (01.07.2013)
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Journal Article
Conference Proceeding
Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures
Toledo, J., Manzaneque, T., Hernando-García, J., Vázquez, J., Ababneh, A., Seidel, H., Lapuerta, M., Sánchez-Rojas, J. L.
Published in Microsystem technologies (2014)
Published in Microsystem technologies (2014)
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Journal Article
Conference Proceeding
Comparison of two types of acoustic biosensors to detect immunoreactions: Love-wave sensor working in dynamic mode and QCM working in static mode
Matatagui, D., Fontecha, J., Fernández, M.J., Oliver, M.J., Hernando-García, J., Sánchez-Rojas, J.L., Gràcia, I., Cané, C., Santos, J.P., Horrillo, M.C.
Published in Sensors and actuators. B, Chemical (01.12.2013)
Published in Sensors and actuators. B, Chemical (01.12.2013)
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Journal Article
Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop
Manzaneque, T, Hernando-García, J, Ababneh, A, Schwarz, P, Seidel, H, Schmid, U, Sánchez-Rojas, J L
Published in Journal of micromechanics and microengineering (01.02.2011)
Published in Journal of micromechanics and microengineering (01.02.2011)
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Journal Article
Reusable chromium-coated quartz crystal microbalance for immunosensing
Oliver, M.J., Hernando-García, J., Pobedinskas, P., Haenen, K., Ríos, A., Sánchez-Rojas, J.L.
Published in Colloids and surfaces, B, Biointerfaces (01.11.2011)
Published in Colloids and surfaces, B, Biointerfaces (01.11.2011)
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Journal Article
Selective modal excitation in coupled piezoelectric microcantilevers
Gil, M., Manzaneque, T., Hernando-García, J., Ababneh, A., Seidel, H., Sánchez-Rojas, J. L.
Published in Microsystem technologies (01.08.2012)
Published in Microsystem technologies (01.08.2012)
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Journal Article
Conference Proceeding
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
Manzaneque, Tomás, Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Al-Omari, A. N., Kucera, M., Bittner, A., Schmid, U., Seidel, H., Sánchez-Rojas, J. L.
Published in Microsystem technologies (01.04.2014)
Published in Microsystem technologies (01.04.2014)
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Journal Article
Conference Proceeding
Resonantly excited AlN-based microcantilevers for immunosensing
Oliver, M. J., Hernando-García, J., Ababneh, A., Seidel, H., Schmid, U., Andrés, J. P., Pobedinskas, P., Haenen, K., Sánchez-Rojas, J. L.
Published in Microsystem technologies (01.08.2012)
Published in Microsystem technologies (01.08.2012)
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Journal Article
Conference Proceeding
Comparative Evaluation between Two Acoustic Immunosensors: Love-wave and QCM, and Systems of Measurement: Dynamic and Static
Matatagui, D., Fontecha, J., Fernández, M.J., Oliver, M.J., Hernando-García, J., Sánchez-Rojas, J.L., Gràcia, I., Cané, C., Santos, J.P., Horrillo, M.C.
Published in Procedia engineering (2012)
Published in Procedia engineering (2012)
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Journal Article
Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media
Ruiz-Díez, V, Hernando-García, J, Toledo, J, Manzaneque, T, Kucera, M, Pfusterschmied, G, Schmid, U, Sánchez-Rojas, J L
Published in Journal of micromechanics and microengineering (22.07.2016)
Published in Journal of micromechanics and microengineering (22.07.2016)
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Journal Article
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplates
Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Seidel, H., Sánchez-Rojas, J. L.
Published in Microsystem technologies : sensors, actuators, systems integration (01.07.2016)
Published in Microsystem technologies : sensors, actuators, systems integration (01.07.2016)
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Journal Article
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode
Ruiz, V., Hernando-García, J., Ababneh, A., Seidel, H., Schmid, U., Sánchez-Rojas, J. L.
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2012)
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2012)
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Journal Article
Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode
RUIZ, V, HERNANDO-GARCIA, J, ABABNEH, A, SEIDEL, H, SCHMID, U, SANCHEZ-ROJAS, J. L
Published in Microsystem technologies (2012)
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Published in Microsystem technologies (2012)
Conference Proceeding