Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems
Herfst, R.W., Klop, W.A., Eschen, M., van den Dool, T.C., Koster, N.B., Sadeghian, H.
Published in Measurement : journal of the International Measurement Confederation (01.10.2014)
Published in Measurement : journal of the International Measurement Confederation (01.10.2014)
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Journal Article
Time and voltage dependence of dielectric charging in RF MEMS capacitive switches
Herfst, R.W., Steeneken, P.G., Schmitz, J.
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
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Conference Proceeding
Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches
Herfst, R.W., Steeneken, P.G., Schmitz, J., Mank, A.J.G., van Gils, M.
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
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Conference Proceeding
Identifying degradation mechanisms in RF MEMS capacitive switches
Herfst, R.W., Steeneken, P.G., Schmitz, J.
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding
Chaos in Electrostatically Actuated RF-MEMS Measured and Modeled
Stulemeijer, J., Herfst, R.W., Bielen, J.A.
Published in 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (01.01.2009)
Published in 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (01.01.2009)
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Conference Proceeding