Stability of the hydrophilic behavior of oxygen plasma activated SU-8
Walther, Ferdinand, Davydovskaya, Polina, Zürcher, Stefan, Kaiser, Michael, Herberg, Helmut, Gigler, Alexander M, Stark, Robert W
Published in Journal of micromechanics and microengineering (01.03.2007)
Published in Journal of micromechanics and microengineering (01.03.2007)
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Journal Article
Surface hydrophilization of SU-8 by plasma and wet chemical processes
Walther, Ferdinand, Drobek, Tanja, Gigler, Alexander M., Hennemeyer, Marc, Kaiser, Michael, Herberg, Helmut, Shimitsu, Tetsuji, Morfill, Gregor E., Stark, Robert W.
Published in Surface and interface analysis (01.12.2010)
Published in Surface and interface analysis (01.12.2010)
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Journal Article