Improving Automated TEM Metrology Based on AI Few Shot Learning-DRAM Word Line Patterning Layer and Logic NMOS eSD Seam
Oh, Seungwoo, Lim, Sung Jin, Lee, Soon-Gun, Jeong, SeongHoon, Song, Changseop, Kong, Chanwoong, Shon, Su-Bong, Park, Hansaem, Lee, SungHo, Choi, Hyunsu, Heo, Yumi
Published in Microscopy and microanalysis (22.07.2023)
Published in Microscopy and microanalysis (22.07.2023)
Get full text
Journal Article
Synthesis of Benzothiazoles through Copper-Catalyzed One-Pot Three-Component Reactions with Use of Sodium Hydrosulfide as a Sulfur Surrogate
Park, Namjin, Heo, Yumi, Kumar, Manian Rajesh, Kim, Yong, Song, Kwang Ho, Lee, Sunwoo
Published in European journal of organic chemistry (01.04.2012)
Published in European journal of organic chemistry (01.04.2012)
Get full text
Journal Article
HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
PARK SOYEON, YOON BYERI, HEO YUMI, SHIN SEUNG WOOK, CHOI SUNGHO, KANG SUNHAE, KIM YOUNGMIN
Year of Publication 15.06.2021
Get full text
Year of Publication 15.06.2021
Patent
Synthesis, characterization of palladium hydroxysalen complex and its application in the coupling reaction of arylboronic acids: Mizoroki–Heck type reaction and decarboxylative couplings
Heo, Yumi, Kang, Yi Young, Palani, Thiruvengadam, Lee, Junseong, Lee, Sunwoo
Published in Inorganic chemistry communications (01.09.2012)
Published in Inorganic chemistry communications (01.09.2012)
Get full text
Journal Article
POLYMER, ORGANIC LAYER COMPOSITION, AND METHOD FOR FORMING PATTERNS
MUN, Soohyoun, HEO, Yumi, NAMGUNG, Ran, NAM, Younhee, RATHWELL, Dominea, KWON, Hyo Young, JUNG, Hyeonil, SONG, Hyunji
Year of Publication 27.07.2017
Get full text
Year of Publication 27.07.2017
Patent
Study on spin-on hardmask for quad-layer application
Park, Yushin, Lim, Sanghak, Shin, Seungwook, Kim, Jinhyung, Kim, Yunjun, Kim, Seunghyun, Lim, Jaebum, Kim, Sung Hwan, Jung, Hyeonil, Heo, Yumi, Yang, Sunyoung, Yu, Jeong Yun
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Get full text
Conference Proceeding
Monomer, organic layer composition, organic layer, and method of forming patterns
Mun, Soohyoun, Namgung, Ran, Heo, Yumi, Kang, Sunhae, Kwon, Hyo Young, Nam, Younhee, Kim, Young Min
Year of Publication 30.07.2019
Get full text
Year of Publication 30.07.2019
Patent
MONOMER, ORGANIC LAYER COMPOSITION, ORGANIC LAYER, AND METHOD OF FORMING PATTERNS
MUN Soohyoun, KWON Hyo Young, NAM Younhee, KIM Young Min, KANG Sunhae, HEO Yumi, NAMGUNG Ran
Year of Publication 12.01.2017
Get full text
Year of Publication 12.01.2017
Patent
ChemInform Abstract: Synthesis of Benzothiazoles Through Copper-Catalyzed One-Pot Three-Component Reactions with Use of Sodium Hydrosulfide as a Sulfur Surrogate
Park, Namjin, Heo, Yumi, Kumar, Manian Rajesh, Kim, Yong, Song, Kwang Ho, Lee, Sunwoo
Published in ChemInform (28.08.2012)
Published in ChemInform (28.08.2012)
Get full text
Journal Article
Polymer, organic layer composition, and method of forming patterns
RATHWELL, DOMINEA, KWON, HYO YOUNG, JUNG, HYEONIL, HEO, YUMI, NAMGUNG, RAN, MUN, SOOHYOUN, SONG, HYUNJI, NAM, YOUNHEE
Year of Publication 01.08.2019
Get full text
Year of Publication 01.08.2019
Patent