Multifunctional high-reflective and antireflective layer systems with easy-to-clean properties
Glöß, D., Frach, P., Gottfried, C., Klinkenberg, S., Liebig, J.-S., Hentsch, W., Liepack, H., Krug, M.
Published in Thin solid films (30.05.2008)
Published in Thin solid films (30.05.2008)
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Conference Proceeding
In situ measurements of optical film parameters and plasma monitoring during reactive sputtering for advanced in-line process control
Richter, U., Hentsch, W., Liepack, H., Kruse, R., Dittrich, R.
Published in Thin solid films (30.05.2008)
Published in Thin solid films (30.05.2008)
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Conference Proceeding
Advantageous possibilities, design aspects and technical use of double-ring magnetron sputter sources
Frach, P., Goedicke, K., Winkler, T., Gottfried, Chr, Walde, H., Hentsch, W.
Published in Surface & coatings technology (01.09.1995)
Published in Surface & coatings technology (01.09.1995)
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Conference Proceeding
Advanced thermal processing of semiconductor materials in the msec-range
Skorupa, W., Yankov, R.A., Voelskow, M., Anwand, W., Panknin, D., McMahon, R.A., Smith, M., Gebel, T., Rebohle, L., Fendler, R., Hentsch, W.
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
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Conference Proceeding
Millisecond Annealing with Flashlamps: Tool and Process Challenges
Gebel, T., Rebohle, L., Fendler, R., Hentsch, W., Skorupa, W., Voelskow, M., Anwand, W., Yankov, R.A.
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
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Conference Proceeding
A New Method for High-Rate Deep Dry Etching of Silicate Glass with Variable ETCH Profile
Bertz, A., Fendler, R., Schuberth, R., Hentsch, W., Gessner, T.
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
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Conference Proceeding
Millisecond processing beyond chip technology: From electronics to photonics
Skorupa, W., Anwand, W., Posselt, M., Prucnal, S., Rebohle, L., Voelskow, M., Zhou, S., McMahon, R.A., Smith, M., Gebel, T., Hentsch, W., Fendler, R., Luthge, T., Satta, A., Borseth, T.M., Kuznetsov, A.Yu, Svensson, B.G.
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
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Conference Proceeding