A MEMS-based, high-sensitivity pressure sensor for ultraclean semiconductor applications
Henning, A.K., Mourlas, N., Metz, S., Zias, A.
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)
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Conference Proceeding
Microfluidic MEMS for semiconductor processing
Henning, Albert K
Published in Proceedings - International Conference on Wafer Scale Integration (01.01.1997)
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Published in Proceedings - International Conference on Wafer Scale Integration (01.01.1997)
Journal Article
Microfluidic MEMS for semiconductor processing
Henning, Albert K., Fitch, John S., Harris, James M., Dehan, Edward B., Cozad, Bradford A., Christel, Lee, Fathi, Youssof, Hopkins, Dean A., Lilly, Les J., McCulley, Wendell, Weber, Walter A., Zdeblick, Mark
Published in IEEE transactions on components, packaging, and manufacturing technology. Part B, Advanced packaging (01.11.1998)
Published in IEEE transactions on components, packaging, and manufacturing technology. Part B, Advanced packaging (01.11.1998)
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Journal Article
Conference Proceeding
SOLAR ANTENNA ARRAY FABRICATION
COOKE, Laurence H, COUSINS, Robert E, CHENG, Yao Te, OLSON, Darin S, PRESTON, Richard T, COOKE, David B, HENNING, Albert K, HEGEDUS, Andreas, BURKE, John, COMITA, Paul
Year of Publication 21.03.2024
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Year of Publication 21.03.2024
Patent
Solar antenna array fabrication
Cooke, Laurence H, Olson, Darin S, Comita, Paul, Cousins, Robert E, Hegedus, Andreas, Henning, Albert K, Burke, John, Cooke, David B, Preston, Richard T, Cheng, Yao Te
Year of Publication 21.11.2023
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Year of Publication 21.11.2023
Patent
Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC
Rajendran, Bipin, Henning, Albert K., Cronquist, Brian, Or-Bach, Zvi
Published in 2013 IEEE International 3D Systems Integration Conference (3DIC) (01.10.2013)
Published in 2013 IEEE International 3D Systems Integration Conference (3DIC) (01.10.2013)
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Conference Proceeding
Modified ELTRAN® - A game changer for Monolithic 3D
Or-Bach, Zvi, Cronquist, Brian, Wurman, Zeev, Beinglass, Israel, Henning, Albert K.
Published in 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2015)
Published in 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2015)
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Conference Proceeding
SOLAR ANTENNA ARRAY FABRICATION
COOKE, Laurence H, COUSINS, Robert E, OLSON, Darin S, PRESTON, Richard T, COOKE, David B, HENNING, Albert K, CHENG, Yao-Te, BURKE, John, COMITA, Paul
Year of Publication 01.09.2022
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Year of Publication 01.09.2022
Patent
METHOD AND APPARATUS FOR IMPROVING INK DEPOSITION
SHILE, RAYMOND ROGER, FRAGALA, JOSEPH S, HENNING, ALBERT K, ROZHOK, SERGEY, V
Year of Publication 15.08.2013
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Year of Publication 15.08.2013
Patent
METHOD AND APPARATUS FOR IMPROVING INK DEPOSITION
SHILE, RAYMOND ROGER, FRAGALA, JOSEPH S, HENNING, ALBERT K, ROZHOK, SERGEY, V
Year of Publication 10.05.2013
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Year of Publication 10.05.2013
Patent
HIGH DENSITY, HARD TIP ARRAYS
SHILE, RAYMOND ROGER, AMRO, NABIL A, FRAGALA, JOSEPH S, HENNING, ALBERT K, HAAHEIM, JASON R
Year of Publication 07.03.2013
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Year of Publication 07.03.2013
Patent