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"Hellig, Kay"
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"Hellig, Kay"
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Verfahren zur Herstellung einer integrierten Schaltung
by
HELLIG
,
KAY
,
AMINPUR, MASSUD
Year of Publication
26.05.2011
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Method of removing inorganic gate antireflective coating after spacer formation
by
HELLIG KAY
Year of Publication
09.03.2004
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Method of removing inorganic gate antireflective coating after spacer formation
by
Hellig
,
Kay
Year of Publication
09.03.2004
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Verfahren und Technik zur Herstellung einer Gateelektrode unter Anwendung einer Hartmaske
by
HELLIG
,
KAY
,
AMINPUR, MASSUD-A
Year of Publication
14.01.2010
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Technique for forming a gate electrode by using a hard mask
by
HELLIG KAY
,
AMINPUR MASSUD
Year of Publication
19.12.2006
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Technique for forming a gate electrode by using a hard mask
by
Aminpur, Massud
,
Hellig
,
Kay
Year of Publication
19.12.2006
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METHOD OF MANUFACTURING MULTI-LEVEL CONTACTS BY SIZING OF CONTACT SIZES IN INTEGRATED CIRCUITS
by
HELLIG KAY
,
AMNIPUR MASSUD
Year of Publication
24.11.2006
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Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
by
HELLIG KAY
,AMINPUR MASSUD
Year of Publication
12.07.2006
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Method Of Manufacturing Multi-Level Contacts By Sizing Of Contact Sizes In Intergrated Circuits
by
MASSUD AMINPUR
,
KAY HELLIG
Year of Publication
10.05.2006
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Verfahren zur Herstellung von Mehrebenenkontakten durch Dimensionierung von Kontaktgrössen in integrierten Schaltungen
by
HELLIG
,
KAY
,
AMINPUR, MASSUD
Year of Publication
27.04.2006
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Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
by
HELLIG KAY
,
AMNIPUR MASSUD
Year of Publication
21.09.2005
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Technique for forming a gate electrode by using a hard mask
by
HELLIG KAY
,
AMINPUR MASSUD
Year of Publication
02.06.2005
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METHOD OF MANUFACTURING MULTI-LEVEL CONTACTS BY SIZING OF CONTACT SIZES IN INTEGRATED CIRCUITS
by
HELLIG
,
KAY
,
AMNIPUR, MASSUD
Year of Publication
29.04.2005
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METHOD OF MANUFACTURING MULTI-LEVEL CONTACTS BY SIZING OF CONTACT SIZES IN INTEGRATED CIRCUITS
by
HELLIG
,
KAY
,
AMNIPUR, MASSUD
Year of Publication
27.04.2005
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Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
by
MASSUD AMINPUR
,
KAY HELLIG
Year of Publication
15.02.2005
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METHOD OF MANUFACTURING MULTI-LEVEL CONTACTS BY SIZING OF CONTACT SIZES IN INTEGRATED CIRCUITS
by
HELLIG
,
KAY
,
AMINPUR, MASSUD
Year of Publication
10.02.2005
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Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
by
HELLIG KAY
,
AMINPUR MASSUD
Year of Publication
07.12.2004
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Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
by
Hellig
,
Kay
,
Aminpur, Massud
Year of Publication
07.12.2004
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METHOD FOR ENDPOINT DETECTION DURING ETCH
by
MASSUD AMINPUR
,
KAY HELLIG
Year of Publication
19.03.2004
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METHOD FOR ENDPOINT DETECTION DURING ETCH
by
HELLIG
,
KAY
,
AMINPUR, MASSUD
Year of Publication
11.03.2004
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