In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
Merkx, Marc J. M., Tezsevin, Ilker, Yu, Pengmei, Janssen, Thijs, Heinemans, Rik H. G. M., Lengers, Rik J., Chen, Jiun-Ruey, Jezewski, Christopher J., Clendenning, Scott B., Kessels, Wilhelmus M. M., Sandoval, Tania E., Mackus, Adriaan J. M.
Published in The Journal of chemical physics (28.05.2024)
Published in The Journal of chemical physics (28.05.2024)
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