Advanced techniques for enhanced Ion Beam Etch uniformity
Goglia, Peter, Hegde, Hari, Pilloux, Yannick
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding
Primary beam energy dependence of properties in ion beam sputtered spin–valve films
Hegde, Hari, Wang, Jinsong, Hayes, Alan, Kanarov, Viktor, Yevtukov, R., Devasahayam, Adrian J., Gambino, Richard J., Mao, Ming, Miller, Mark
Published in Journal of applied physics (15.04.1999)
Published in Journal of applied physics (15.04.1999)
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Journal Article
Electromagnetic field generator and method of operation
Hegde, Hari S, Risca, Mihai S, Hayes, Alan V, Navy, Abraham J, Fremgen, Roger P
Year of Publication 08.04.2003
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Year of Publication 08.04.2003
Patent
Electromagnetic field generator and method of operation
RISCA MIHAI S, FREMGEN ROGER P, NAVY ABRAHAM J, HAYES ALAN V, HEGDE HARI S
Year of Publication 08.04.2003
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Year of Publication 08.04.2003
Patent
ELECTROMAGNETIC FIELD GENERATOR AND METHOD OF OPERATION
HEGDE, HARI S, RISCA, MIHAI S, HAYES, ALAN V, NAVY, ABRAHAM J, FREMGEN, ROGER P
Year of Publication 25.04.2002
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Year of Publication 25.04.2002
Patent
ELECTROMAGNETIC FIELD GENERATOR AND METHOD OF OPERATION
RISCA MIHAI S, FREMGEN ROGER P, NAVY ABRAHAM J, HAYES ALAN V, HEGDE HARI S
Year of Publication 25.04.2002
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Year of Publication 25.04.2002
Patent
Electromagnetic field generator and method of operation
NAVY, ABRAHAM J, HAYES, ALAN V, FREMGEN, ROGER P, RISCA, MIHAI S, HEGDE, HARI S
Year of Publication 01.08.2001
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Year of Publication 01.08.2001
Patent
ELECTROMAGNETIC FIELD GENERATOR AND METHOD OF OPERATION
HAYES, ALAN, V, NAVY, ABRAHAM, J, HEGDE, HARI, S, RISCA, MIHAI, S, FREMGEN, ROGER, P
Year of Publication 04.07.2001
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Year of Publication 04.07.2001
Patent
Charged particle source and operation thereof
BORGES CARLOS FERNANDO DE MELLO, DRUZ BORIS L, CELARU ADRIAN, RAJAN RENGA, HEGDE HARI, HAYES ALAN V, REISS IRA, FREMGEN, JR. ROGER P, WILLIAMS KURT E, KANAROV VIKTOR, YEVTUKHOV RUSTAM
Year of Publication 27.02.2007
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Year of Publication 27.02.2007
Patent
Charged particle source and operation thereof
Kanarov, Viktor, Hayes, Alan V, Yevtukhov, Rustam, Reiss, Ira, Fremgen, Jr, Roger P, Celaru, Adrian, Williams, Kurt E, Borges, Carlos Fernando de Mello, Druz, Boris L, Rajan, Renga, Hegde, Hari
Year of Publication 27.02.2007
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Year of Publication 27.02.2007
Patent
ELECTROMAGNETIC FIELD GENERATOR AND METHOD OF OPERATION
HAYES, ALAN, V, NAVY, ABRAHAM, J, HEGDE, HARI, S, RISCA, MIHAI, S, FREMGEN, ROGER, P
Year of Publication 16.03.2000
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Year of Publication 16.03.2000
Patent
Charged particle source and operation thereof
Kanarov, Viktor, Hayes, Alan, Yevtukhov, Rustam, Reiss, Ira, Fremgen, Roger, Celaru, Adrian, Williams, Kurt, de Mello Borges, Carlos, Druz, Boris, Rajan, Renga, Hegde, Hari
Year of Publication 26.08.2004
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Year of Publication 26.08.2004
Patent
Charged particle source and operation thereof
DRUZ BORIS L, CELARU ADRIAN, RAJAN RENGA, HEGDE HARI, FREMGEN ROGER P, HAYES ALAN V, REISS IRA, WILLIAMS KURT E, KANAROV VIKTOR, YEVTUKHOV RUSTAM, DE MELLO BORGES CARLOS FERNANDO
Year of Publication 26.08.2004
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Year of Publication 26.08.2004
Patent