Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
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Year of Publication 03.05.2005
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Year of Publication 03.05.2005
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Pitcher-shaped active area for field effect transistor and method of forming same
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Year of Publication 01.11.2005
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Year of Publication 01.11.2005
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Pitcher-shaped active area for field effect transistor and method of forming same
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Year of Publication 01.11.2005
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Year of Publication 01.11.2005
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OXIDATION OF SILICON NITRIDE FILMS IN SEMICONDUCTOR DEVICES
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Year of Publication 28.08.2003
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Year of Publication 28.08.2003
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OXIDATION OF SILICON NITRIDE FILMS IN SEMICONDUCTOR DEVICES
FLAITZ, PHILIP, L, GLUSCHENKOV, OLEG, HEENAN, CAROL, J, JAMMY, RAJARAO, FALTERMEIER, JONATHAN, E, BALLANTINE, ARNE, W, GILBERT, JEFFREY, D
Year of Publication 12.12.2002
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Year of Publication 12.12.2002
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Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 05.12.2002
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Year of Publication 05.12.2002
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APPARATUS AND METHOD FOR FORMING AN OXYNITRIDE INSULATING LAYER ON A SEMICONDUCTOR WAFER
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 12.09.2002
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Year of Publication 12.09.2002
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Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 20.08.2002
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Year of Publication 20.08.2002
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Pitcher-shaped active area for field effect transistor and method of forming same
GLUSCHENKOV OLEG, HEENAN CAROL J, SUDO AKIRA, SEITZ MIHEL, DIVAKARUNI RAMA, JAMMY RAJARAO, BEINTNER JOCHEN, KIM BYEONG, FALTERMEIER JOHNATHAN, FLAITZ PHILIP L, TAKEGAWA YOICHI
Year of Publication 09.09.2004
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Year of Publication 09.09.2004
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Pitcher-shaped active area for field effect transistor and method of forming same
Beintner, Jochen, Divakaruni, Rama, Faltermeier, Johnathan, Flaitz, Philip L, Gluschenkov, Oleg, Heenan, Carol J, Jammy, Rajarao, Kim, Byeong, Seitz, Mihel, Sudo, Akira, Takegawa, Yoichi
Year of Publication 08.06.2004
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Year of Publication 08.06.2004
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Pitcher-shaped active area for field effect transistor and method of forming same
GLUSCHENKOV OLEG, HEENAN CAROL J, SUDO AKIRA, SEITZ MIHEL, DIVAKARUNI RAMA, JAMMY RAJARAO, BEINTNER JOCHEN, KIM BYEONG, FALTERMEIER JOHNATHAN, FLAITZ PHILIP L, TAKEGAWA YOICHI
Year of Publication 08.06.2004
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Year of Publication 08.06.2004
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Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 12.02.2002
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Year of Publication 12.02.2002
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Oxidation of silicon nitride films in semiconductor devices
GLUSCHENKOV OLEG, HEENAN CAROL J, JAMMY RAJARAO, KATSUMADA RYOTA, BALLANTINE ARNE W, GILBERT JEFFREY D, FALTERMEIER JOHNATHAN E, FLAITZ PHILIP L
Year of Publication 05.12.2002
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Year of Publication 05.12.2002
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