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Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
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Conference Proceeding
Method of forming capacitor and dielectric layer thereof and formed capacitor
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Year of Publication 01.06.2011
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Year of Publication 01.06.2011
Patent