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Year of Publication 10.07.2023
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Year of Publication 10.07.2023
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피쳐에 산화물 층을 형성하기 위한 이중 압력 산화 방법
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Year of Publication 09.08.2024
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활성 증기 생성을 이용한 RTP(rapid thermal processing) 챔버 상의 선택적 산화
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Year of Publication 26.02.2024
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Year of Publication 26.02.2024
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REMOTE PLASMA OXIDATION CHAMBER
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Year of Publication 07.04.2023
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Year of Publication 07.04.2023
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ARGON ADDITION TO REMOTE PLASMA OXIDATION
OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, KIM TAEWAN, HANSEN ERIKA, SWENBERG JOHANES S, HAWRYLCHAK LARA, LO HANSEL
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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SHOWERHEAD DESIGN
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Year of Publication 19.04.2022
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Year of Publication 19.04.2022
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수소 및 NH3 플라즈마 적용을 위한 보호 세라믹 코팅들을 갖는 프로세스 키트
LIU WEI, DUAN REN GUAN, HAWRYLCHAK LARA, HWANG BERNARD L, WU JIAN, BEVAN MALCOLM J
Year of Publication 10.03.2023
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Year of Publication 10.03.2023
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ARGON ADDITION TO REMOTE PLASMA OXIDATION
OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, KIM TAEWAN, HANSEN ERIKA, SWENBERG JOHANES S, HAWRYLCHAK LARA, LO HANSEL
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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A THIN FILM TREATMENT PROCESS
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Year of Publication 05.06.2023
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Year of Publication 05.06.2023
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보호 코팅을 갖는 프로세스 챔버 프로세스 키트
LIU WEI, WANG LINLIN, BEVAN MALCOLM, HAWRYLCHAK LARA, WU JIAN, GUARINI THERESA KRAMER
Year of Publication 25.01.2021
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Year of Publication 25.01.2021
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광학 방출 분광계를 교정하기 위한 방법
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Year of Publication 06.12.2021
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Year of Publication 06.12.2021
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반응물 가스를 전달하는 처리 시스템 및 방법
OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, HANSEN ERIKA, GEORGE RENE, HAWRYLCHAK LARA, SHONO ERIC, LO HANSEL, KAUFMAN OSBORN TOBIN, SHAH KARTIK
Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH
OLSEN CHRISTOPHER S, LO CHI WEI, CHOPRA SAURABH, HAWRYLCHAK LARA, TOBIN JEFFREY, GUARINI THERESA KRAMER, STONE PETER
Year of Publication 30.04.2021
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Year of Publication 30.04.2021
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