Effect of H2/He plasma treatment on porous low dielectric constant materials
Cheng, Yi-Lung, Haung, Chiao-Wei, Hung, Wei-Jie, Sun, Chung-Ren, Lee, Wen-Hsi
Published in Surface & coatings technology (25.12.2016)
Published in Surface & coatings technology (25.12.2016)
Get full text
Journal Article