MEMS MEMS A MEMS DEVICE AND AN AUDIO DEVICE COMPRISING SUCH A MEMS DEVICE
HAUBOLD MARCO, EVERSMANN BJOERN OLIVER, MAYRHOFER DOMINIK, BRETTHAUER CHRISTIAN
Year of Publication 27.12.2023
Get full text
Year of Publication 27.12.2023
Patent
MEMS MEMS MEMS DEVICE AND APPARATUS HAVING SUCH A MEMS DEVICE
HAUBOLD MARCO, MAYRHOFER DOMINIK, TIMME HANS JOERG, BRETTHAUER CHRISTIAN
Year of Publication 27.12.2023
Get full text
Year of Publication 27.12.2023
Patent
Compact High-Performance Vibration Sensor Based on Single-Backplate MEMS Technology
Goswami, Somu, Bretthauer, Christian, Bogner, Andreas, Basavanna, Abhiraj, Anzinger, Sebastian, Haubold, Marco, Lorenz, Gunar, Strasser, Johann, Weber, Daniel, Servadei, Lorenzo, Wille, Robert
Published in 2022 IEEE Sensors (30.10.2022)
Published in 2022 IEEE Sensors (30.10.2022)
Get full text
Conference Proceeding
A SATELLITE MULTIPLE-BEAM ANTENNA FOR HIGH-RATE DATA RELAYS
Greda, Lukasz A, Winterstein, Andreas, Dreher, Achim, Figur, Sascha A, Schoenlinner, Bernhard, Ziegler, Volker, Haubold, Marco, Brueck, Martin W
Published in Electromagnetic waves (Cambridge, Mass.) (01.01.2014)
Published in Electromagnetic waves (Cambridge, Mass.) (01.01.2014)
Get full text
Journal Article
Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing
Merbeler, Fabian, Wismath, Sonja, Haubold, Marco, Bretthauer, Christian, Kupnik, Mario
Published in 2022 IEEE International Ultrasonics Symposium (IUS) (10.10.2022)
Published in 2022 IEEE International Ultrasonics Symposium (IUS) (10.10.2022)
Get full text
Conference Proceeding
Miniaturized and Highly Integrated Humidity Sensor with Biocompatible Sensing Material for Smart Farming
Schlagmann, Moritz, Selbmann, Franz, Haubold, Marco, Vobl, Matthias, Otto, Thomas
Published in 2022 Smart Systems Integration (SSI) (27.04.2022)
Published in 2022 Smart Systems Integration (SSI) (27.04.2022)
Get full text
Conference Proceeding
MEMS Device and Apparatus Having Such a MEMS Device
Bretthauer, Christian, Mayrhofer, Dominik, Timme, Hans-Jörg, Haubold, Marco
Year of Publication 21.12.2023
Get full text
Year of Publication 21.12.2023
Patent
MEMS Device and Audio Device Including Such a MEMS Device
Bretthauer, Christian, Mayrhofer, Dominik, Eversmann, Bjoern Oliver, Haubold, Marco
Year of Publication 21.12.2023
Get full text
Year of Publication 21.12.2023
Patent
A MEMS PACKAGE AND AN AUDIO DEVICE COMPRISING SUCH A MEMS PACKAGE
EVERSMANN, Bjoern Oliver, BRETTHAUER, Christian, HAUBOLD, Marco, MAYRHOFER, Dominik
Year of Publication 20.12.2023
Get full text
Year of Publication 20.12.2023
Patent
MEMS DEVICE AND APPARATUS HAVING SUCH A MEMS DEVICE
BRETTHAUER, Christian, TIMME, Hans-Joerg, HAUBOLD, Marco, MAYRHOFER, Dominik
Year of Publication 20.12.2023
Get full text
Year of Publication 20.12.2023
Patent
Developments Trends in the Field of Wafer Bonding Technologies
Wiemer, Maik, Haubold, Marco, Jia, Chenping, Wuensch, Dirk, Froemel, Joerg, Gessner, Thomas
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
Get full text
Journal Article
Pressure Sensing Device
Boitier-Mahlberg, Anne, Stegemann, Maik, Vogt, Mirko, Müller, Marco, Haubold, Marco, Förster, Anita
Year of Publication 19.10.2023
Get full text
Year of Publication 19.10.2023
Patent
PRESSURE SENSING DEVICE
BOITIER-MAHLBERG, Anne, HAUBOLD, Marco, FOERSTER, Anita, STEGEMANN, Maik, MUELLER, Marco, VOGT, Mirko
Year of Publication 18.10.2023
Get full text
Year of Publication 18.10.2023
Patent