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Enhanced nitrogen incorporation in the 〈112̄0〉 directions on the (0001̄) facet of 4H-SiC crystals
by
Hashiguchi
,
Takato
,
Ota, Takuto
,
Asano, Shunsuke
,
Ohtani, Noboru
Published in
Japanese Journal of Applied Physics
(01.09.2022)
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Journal Article
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Subject Area
engineering
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physics
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Topic
4h-sic
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atomic force microscopy
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crystal growth
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doping
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nitrogen
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nitrogen doping
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Language
English
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AUTh Library subscriptions: IOP Publishing
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