Improvement of Simultaneous 5-Axis Controlled Machining Accuracy by CL-Data Modification
Sato, Ryuta, Morishita, Kiichi, Nishida, Isamu, Shirase, Keiichi, Hasegawa, Masanobu, Saito, Akira, Iwasaki, Takayuki
Published in International journal of automation technology (05.09.2019)
Published in International journal of automation technology (05.09.2019)
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Method of Planning Tool Postures for Deep Groove Machining of Complex Shapes – Development of an Automatic Planning Method that Considers the Motions of the Rotational Axis when the Tool Reverses Direction in Grooved Shapes
Ichikawa, Kohei, Kaneko, Jun’ichi, Hasegawa, Masanobu, Iwasaki, Takayuki, Horio, Kenichiro
Published in International journal of automation technology (01.03.2017)
Published in International journal of automation technology (01.03.2017)
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Journal Article
Development of optical coatings for 157-nm lithography. I. Coating materials
Niisaka, Shunsuke, Saito, Tadahiko, Saito, Jun, Tanaka, Akira, Matsumoto, Akira, Otani, Minoru, Biro, Ryuji, Ouchi, Chidane, Hasegawa, Masanobu, Suzuki, Yasuyuki, Sone, Kazuho
Published in Applied optics (2004) (01.06.2002)
Published in Applied optics (2004) (01.06.2002)
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Development of one-shot aspheric measurement system with a Shack-Hartmann sensor
Furukawa, Yasunori, Takaie, Yuichi, Maeda, Yoshiki, Ohsaki, Yumiko, Takeuchi, Seiji, Hasegawa, Masanobu
Published in Applied optics. Optical technology and biomedical optics (10.10.2016)
Published in Applied optics. Optical technology and biomedical optics (10.10.2016)
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Development of optical coatings for 157-nm lithography. II. Reflectance, absorption, and scatter measurement
Otani, Minoru, Biro, Ryuji, Ouchi, Chidane, Hasegawa, Masanobu, Suzuki, Yasuyuki, Sone, Kazuho, Niisaka, Shunsuke, Saito, Tadahiko, Saito, Jun, Tanaka, Akira, Matsumoto, Akira
Published in Applied optics (2004) (01.06.2002)
Published in Applied optics (2004) (01.06.2002)
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Double-Grating Lateral Shearing Interferometer for Extreme Ultraviolet Lithography
Liu, Zhiqiang, Sugisaki, Kasumi, Zhu, Yucong, Ishii, Mikihiko, Murakami, Katsuhiko, Saito, Jun, Suzuki, Akiyosi, Hasegawa, Masanobu
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Magnetoelastic Torque Sensor Utilizing FeGa System Magnetostriction Material
HASEGAWA, Masanobu, HASHIMOTO, Kenji, YOSHIMURA, Wataru, OKAZAKI, Teiko, FURUYA, Yasubumi, SHIMADA, Munekatu
Published in Transactions of the Japan Society of Mechanical Engineers Series A (2007)
Published in Transactions of the Japan Society of Mechanical Engineers Series A (2007)
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Shearing Interferometry for at Wavelength Wavefront Measurement of Extreme-Ultraviolet Lithography Projection Optics
Zhu, Yucong, Sugisaki, Katsumi, Murakami, Katsuhiko, Ota, Kazuya, Kondo, Hiroyuki, Ishii, Mikihiko, Kawakami, Jun, Oshino, Tetsuya, Saito, Jun, Suzuki, Akiyoshi, Hasegawa, Masanobu, Sekine, Yoshiyuki, Takeuchi, Seiji, Ouchi, Chidane, Kakuchi, Osamu, Watanabe, Yutaka, Hasegawa, Takayuki, Hara, Shinichi
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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