Simple Method of Correcting Optical Proximity Effect for 0.35 µm Logic LSI Circuits
Kawamura, Eiichi, Haruki, Tamae, Manabe, Yasuo, Isamu Hanyu, Isamu Hanyu
Published in Japanese Journal of Applied Physics (01.12.1995)
Published in Japanese Journal of Applied Physics (01.12.1995)
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Journal Article
MASCOT : Mask pattern correction tool using genetic algorithm
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Conference Proceeding
Journal Article
Simple method of correcting optical proximity effect for 0.35 μm logic LSI circuits
KAWAMURA, E, HARUKI, T, MANABE, Y, HANYU, I
Published in Japanese journal of applied physics (01.12.1995)
Published in Japanese journal of applied physics (01.12.1995)
Get full text
Conference Proceeding