Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies
Potyrailo, Radislav A., Bonam, Ravi K., Hartley, John G., Starkey, Timothy A., Vukusic, Peter, Vasudev, Milana, Bunning, Timothy, Naik, Rajesh R., Tang, Zhexiong, Palacios, Manuel A., Larsen, Michael, Le Tarte, Laurie A., Grande, James C., Zhong, Sheng, Deng, Tao
Published in Nature communications (01.09.2015)
Published in Nature communications (01.09.2015)
Get full text
Journal Article
Bossung curves and focus stigmation matrices for Gaussian beam lithography
Raghunathan, Ananthan, Hartley, John G., Crosland, Nigel
Published in Microelectronic engineering (01.08.2011)
Published in Microelectronic engineering (01.08.2011)
Get full text
Journal Article
Conference Proceeding
13nm gate Intentional Defect Array (IDA) wafer patterning by e-beam lithography for defect metrology evaluation
Raghunathan, Ananthan, Bennett, Steve, Stamper, Harlem O., Hartley, John G., Arceo, Abraham, Johnson, Mark, Deeb, Chris, Patel, Dilip, Nadeau, Jim
Published in Microelectronic engineering (01.08.2011)
Published in Microelectronic engineering (01.08.2011)
Get full text
Journal Article
Conference Proceeding