Machine Learning Assisted New Product Setup
Torres, J. Andres, Kissiov, Ivan, Essam, Mohamed, Hartig, Carsten, Gardner, Richard, Jantzen, Ken, Schueler, Stefan, Niehoff, Martin
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
Advanced optical modeling of thin metals for improved robustness and accuracy of scatterometric models
Hartig, Carsten, Urbanowicz, Adam M., Likhachev, Dmitriy, Altendorf, Ines, Reichel, Andreas, Weisheit, Martin
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
In-line control of material properties of SiOC:H based low-k dielectrics utilizing optical metrology AM: Advanced metrology
Urbanowicz, Adam M., Ebersbach, Peter, Likhachev, Dmitriy, Mezerette, David, Hartig, Carsten
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Practical aspects of TMU based analysis for scatterometry model referencing AM: Advanced metrology
Hartig, Carsten, Urbanowicz, Adam M., Vaid, Alok, Ebersbach, Peter, Fischer, Daniel, Melzer, Robert, Sanchez, Francisco, Mezerette, David, Katz, Yinon, Sendelbach, Matthew
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Antifungal Prophylaxis with Itraconazole in Patients with Acute Leukemia and after Stem Cell Transplantation (SZT): High Plasma Concentrations with a Loading Dose Strategy
Sandherr, Michael, Vogeser, Michael, Hartig, Carsten, Aulmann, Christoph, Fuhrmann, Stefanie, Wondzinski, Linda, Oruzio, Daniel, Schlimok, Guenter
Published in Blood (16.11.2004)
Published in Blood (16.11.2004)
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Journal Article
Method for in-die overlay control using FEOL dummy fill layer
Schmidt, Martin, Thierbach, Stefan, Schuring, Andreas, Moll, Peter, Hartig, Carsten, Fischer, Daniel, Ruhm, Matthias, Überreiter, Guido, Rongen, Stefan
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
Patent
METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
SCHURING Andreas, SCHMIDT Martin, THIERBACH Stefan, RONGEN Stefan, RUHM Matthias, MOLL Peter, FISCHER Daniel, HARTIG Carsten, ÜBERREITER Guido
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
Patent