The realization and design considerations of a flip-chip integrated MEMS tunable capacitor
Harsh, Kevin F, Su, Bingzhi, Zhang, Wenge, Bright, Victor M, Lee, Y.C
Published in Sensors and actuators. A. Physical. (10.03.2000)
Published in Sensors and actuators. A. Physical. (10.03.2000)
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Journal Article
Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators
Zhiping Feng, Wenge Zhang, Bingzhi Su, Harsh, K.F., Gupta, K.C., Bright, V., Lee, Y.C.
Published in 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282) (1999)
Published in 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282) (1999)
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Conference Proceeding
Journal Article
Solder self-assembly for three-dimensional microelectromechanical systems
Harsh, Kevin F., Bright, Victor M., Lee, Y.C.
Published in Sensors and actuators. A. Physical. (02.11.1999)
Published in Sensors and actuators. A. Physical. (02.11.1999)
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Journal Article
MEMS designed for tunable capacitors
Wu, H.D., Harsh, K.F., Irwin, R.S., Wenge Zhang, Mickelson, A.R., Lee, Y.C., Dobsa, J.B.
Published in 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192) (1998)
Published in 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192) (1998)
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Conference Proceeding
Solder self-alignment for optical MEMS
Harsh, K.F., Kladitis, P.E., Michalicek, M.A., Jianglong Zhang, Wenge Zhang, Tuantranont, A., Bright, V.M., Lee, Y.C.
Published in 1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999 Annual Meeting (Cat. No.99CH37009) (1999)
Published in 1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999 Annual Meeting (Cat. No.99CH37009) (1999)
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Conference Proceeding