Kinetic surface roughening in molecular beam epitaxy of InP
Cotta, MA, Hamm, RA, Staley, TW, Chu, SN, Harriott, LR, Panish, MB, Temkin, H
Published in Physical review letters (28.06.1993)
Published in Physical review letters (28.06.1993)
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Journal Article
Mask technologies for soft-x-ray projection lithography at 13 nm
Tennant, D M, Fetter, L A, Harriott, L R, Macdowell, A A, Mulgrew, P P, Pastalan, J Z, Waskiewicz, W K, Windt, D L, Wood Ii, O R
Published in Applied optics (2004) (01.12.1993)
Published in Applied optics (2004) (01.12.1993)
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Journal Article
Electron-optics method for high-throughput in a SCALPEL system: Preliminary analysis
Waskiewicz, W.K., Harriott, L.R., Liddle, J.A., Stanton, S.T., Berger, S.D., Munro, E., Zhu, X.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
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Conference Proceeding
Kinetic roughness in epitaxy (experimental)
Cotta, M.A., Hamm, R.A., Chu, S.N.G., Hull, R., Harriott, L.R., Temkin, H.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1995)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1995)
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Multichamber processing for optoelectronics
Harriott, L.R., Cotta, M.A., Temkin, H., Hamm, R.A., Feygenson, A., Ritter, D., Wang, Y.L.
Published in Microelectronic engineering (01.08.1994)
Published in Microelectronic engineering (01.08.1994)
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Conference Proceeding
InGaAs/InP quantum wells with periodic thickness variation
Bernussi, A.A., Brasil, M.J.S.P., Brum, J.A., Cotta, M.A., Hamm, R.A., Staley, T.W., Chu, S.N.G., Harriott, L.R., Panish, M.B., Temkin, H.
Published in Solid-state electronics (01.04.1994)
Published in Solid-state electronics (01.04.1994)
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Little-Parks oscillations of Tc in patterned microstructures of the oxide superconductor YBa2Cu3O7: Experimental limits on fractional-statistics-particle theories
Gammel, PL, Polakos, PA, Rice, CE, Harriott, LR, Bishop, DJ
Published in Physical review. B, Condensed matter (01.02.1990)
Published in Physical review. B, Condensed matter (01.02.1990)
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Journal Article
The SCALPEL proof of concept system
Harriott, L.R., Berger, S.D., Biddick, C., Blakey, M.I., Bowler, S.W., Brady, K., Camarda, R.M., Connelly, W.F., Crorken, A., Custy, J., DeMarco, R., Farrow, R.C., Felker, J.A., Fetter, L., Freeman, R., Hopkins, L., Huggins, H.A., Knurek, C.S., Kraus, J.S., Liddle, J.A., Mkrtychan, M., Novembre, A.E., Peabody, M.L., Tarascon, R.G., Wade, H.H., Waskiewicz, W.K., Watson, G.P., Werder, K.S., Windt, D.
Published in Microelectronic engineering (01.02.1997)
Published in Microelectronic engineering (01.02.1997)
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Journal Article
Fabrication and Characterization of Interconnected Nanowell Molecular Electronic Devices in Crossbar Architecture
Martin, Z.L., Majumdar, N., Cabral, M.J., Gergel-Hackett, N., Camacho-Alanis, F., Swami, N., Bean, J.C., Harriott, L.R., Yao, Y., Tour, J.M., Long, D., Shashidhar, R.
Published in IEEE transactions on nanotechnology (01.09.2009)
Published in IEEE transactions on nanotechnology (01.09.2009)
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Journal Article
First Optically Active Molecular Electronic Wires
Zhu, Yuliang, Gergel, Nadine, Majumdar, Nabanita, Harriott, Lloyd R, Bean, John C, Pu, Lin
Published in Organic letters (02.02.2006)
Published in Organic letters (02.02.2006)
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Journal Article
Scalpel
Harriott, L.R.
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)
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Conference Proceeding
The SCattering with Angular Limitation in Projection Electron-beam Lithography (SCALPEL) system
LIDDLE, J. A, BERGER, S. D, CUSTY, J, FARROW, R. C, FELKER, J. A, FETTER, L. A, FREEMAN, B, HARRIOTT, L. R, HOPKINS, L.L, HUGGINS, H. A, KNUREK, C. S, KRAUS, J. S, BIDDICK, C. J, MIXON, D. A, MKRTCHYAN, M. M, NOVEMBRE, A. E, PEABODY, M. L, SIMPSON, W. M, TARASCON, R. G, WADE, H. H, WASKIEWICZ, W. K, WATSON, G. P, WILLIAMS, J. K, BLAKEY, M. I, WINDT, D. L, BOLAN, BOWLER, S. W, BRADY, K, CAMARDA, R. M, CONNELLY, W. F, CHORKEN, A
Published in Japanese Journal of Applied Physics (01.12.1995)
Published in Japanese Journal of Applied Physics (01.12.1995)
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Journal Article
Phase shift lithography in the manufacture of sub-120 nm low-voltage DSP circuits
Kizilyalli, I.C., Watson, G.P., Kohler, R.A., Nalamasu, O., Harriott, L.R.
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
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