Hot-filament CVD diamond coatings for optical applications
Sittinger, Volker, Baron, Sarah, Höfer, Markus, Armgardt, Markus, Harig, Tino
Published in Surface & coatings technology (25.03.2023)
Published in Surface & coatings technology (25.03.2023)
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Journal Article
Strategy for silicon based hot-wire chemical vapor deposition without wire silicide formation
Laukart, Artur, Harig, Tino, Höfer, Markus, Schäfer, Lothar
Published in Thin solid films (30.01.2015)
Published in Thin solid films (30.01.2015)
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Journal Article
Modeling of gas flow and deposition profile in HWCVD processes
Pflug, Andreas, Höfer, Markus, Harig, Tino, Armgardt, Markus, Britze, Chris, Siemers, Michael, Melzig, Thomas, Schäfer, Lothar
Published in Thin solid films (30.11.2015)
Published in Thin solid films (30.11.2015)
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Journal Article
In-line deposition of silicon-based films by hot-wire chemical vapor deposition
Schäfer, Lothar, Harig, Tino, Höfer, Markus, Laukart, Artur, Borchert, Dietmar, Keipert-Colberg, Sinje, Trube, Jutta
Published in Surface & coatings technology (25.01.2013)
Published in Surface & coatings technology (25.01.2013)
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Journal Article
Conference Proceeding
COATING INSTALLATION AND METHOD
LAUKART ARTUR, ARMGARDT MARKUS, HARIG TINO, HOFER MARKUS, SCHAFER LOTHAR
Year of Publication 21.03.2012
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Year of Publication 21.03.2012
Patent
COATING INSTALLATION AND COATING METHOD
LAUKART ARTUR, ARMGARDT MARKUS, HARIG TINO, HOFER MARKUS, SCHAFER LOTHAR
Year of Publication 16.02.2012
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Year of Publication 16.02.2012
Patent
COATING INSTALLATION AND COATING METHOD
LAUKART ARTUR, ARMGARDT MARKUS, HARIG TINO, HOFER MARKUS, SCHAFER LOTHAR
Year of Publication 16.02.2012
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Year of Publication 16.02.2012
Patent
Coating device and coating method
LAUKART ARTUR, ARMGARDT MARKUS, HÖFER MARKUS, SCHÄFER LOTHAR, HARIG TINO
Year of Publication 24.03.2015
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Year of Publication 24.03.2015
Patent
Coating device and coating method
LAUKART ARTUR, ARMGARDT MARKUS, HÖFER MARKUS, SCHÄFER LOTHAR, HARIG TINO
Year of Publication 27.01.2015
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Year of Publication 27.01.2015
Patent
DEPOSITION DEVICE AND METHOD
HARIG, TINO, SCHÄFER, LOTHAR, HÖFER, MARKUS, ARMGARDT, MARKUS, LAUKART, ARTUR
Year of Publication 22.10.2014
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Year of Publication 22.10.2014
Patent
COATING INSTALLATION AND METHOD
HARIG, TINO, SCHÄFER, LOTHAR, HÖFER, MARKUS, ARMGARDT, MARKUS, LAUKART, ARTUR
Year of Publication 25.06.2014
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Year of Publication 25.06.2014
Patent
COATING DEVICE AND COATING METHOD
SCHAEFER LOTHAR, LAUKART ARTUR, HOEFER MARKUS, ARMGARDT MARKUS, HARIG TINO
Year of Publication 31.05.2012
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Year of Publication 31.05.2012
Patent
COATING INSTALLATION AND COATING METHOD
SCHAEFER LOTHAR, LAUKART ARTUR, HOEFER MARKUS, ARMGARDT MARKUS, HARIG TINO
Year of Publication 10.05.2012
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Year of Publication 10.05.2012
Patent
COATING DEVICE AND COATING METHOD
SCHAEFER LOTHAR, LAUKART ARTUR, HOEFER MARKUS, ARMGARDT MARKUS, HARIG TINO
Year of Publication 03.05.2012
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Year of Publication 03.05.2012
Patent
COATING DEVICE AND COATING METHOD
LAUKART ARTUR, HOEFER MARKUS, ARMGARDT MARKUS, HARIG TINO, SCHAEFER LOTHER
Year of Publication 26.04.2012
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Year of Publication 26.04.2012
Patent
COATING INSTALLATION AND COATING METHOD
HARIG, TINO, HOEFER, MARKUS, SCHAEFER, LOTHAR, ARMGARDT, MARKUS, LAUKART, ARTUR
Year of Publication 11.04.2012
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Year of Publication 11.04.2012
Patent
DEPOSITION DEVICE AND METHOD
HARIG, TINO, HOEFER, MARKUS, SCHAEFER, LOTHAR, ARMGARDT, MARKUS, LAUKART, ARTUR
Year of Publication 11.04.2012
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Year of Publication 11.04.2012
Patent
COATING INSTALLATION AND METHOD
HARIG, TINO, HOEFER, MARKUS, SCHAEFER, LOTHAR, ARMGARDT, MARKUS, LAUKART, ARTUR
Year of Publication 11.04.2012
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Year of Publication 11.04.2012
Patent