Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin
Xie, Yutong, Davaji, Benyamin, Chakarov, Ivan, Wen, Sandy, Hargrove, Michael, Fried, David, Doerschuk, Peter C., Lal, Amit
Published in IEEE transactions on semiconductor manufacturing (11.07.2024)
Published in IEEE transactions on semiconductor manufacturing (11.07.2024)
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Journal Article
Book Highlight-The Pillar of Collaboration
Saar, Shalom Saada, Hargrove, Michael J.
Published in Global business and organizational excellence (01.11.2013)
Published in Global business and organizational excellence (01.11.2013)
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Journal Article
Accurate Simulation of Transistor-Level Variability for the Purposes of TCAD-Based Device-Technology Cooptimization
Gerrer, Louis, Brown, Andrew R., Millar, Campbell, Hussin, Razaidi, Amoroso, Salvatore Maria, Binjie Cheng, Reid, Dave, Alexander, Craig, Fried, David, Hargrove, Michael, Greiner, Ken, Asenov, Asen
Published in IEEE transactions on electron devices (01.06.2015)
Published in IEEE transactions on electron devices (01.06.2015)
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Journal Article
BinDev: a Metric of Geometric Accuracy for Plasma-etch 3D Modeling Using Computer Vision : YM: Yield Methodologies
Xie, Yutong, Davaji, Benyamin, Doerschuk, Peter C., Lal, Amit, Chakarov, Ivan, Wen, Sandy, Hargrove, Michael, Fried, David
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding
INTEGRATED CIRCUIT HAVING LONG AND SHORT CHANNEL METAL GATE DEVICES AND METHOD OF MANUFACTURE
CARTER RICHARD J, HARGROVE MICHAEL J, KLUTH GEORGE J, PELLERIN JOHN G
Year of Publication 19.01.2011
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Year of Publication 19.01.2011
Patent
Combined C-V/I-V front-end-of-line measurement
Polonsky, S., Realov, S., Jiun-Hsin Liao, Hargrove, M., Ketchen, M.
Published in 2012 IEEE International Conference on Microelectronic Test Structures (01.03.2012)
Published in 2012 IEEE International Conference on Microelectronic Test Structures (01.03.2012)
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Conference Proceeding
RF potential of a 0.18-μm CMOS logic device technology
Burghartz, J.N., Hargrove, M., Webster, C.S., Groves, R.A., Keene, M., Jenkins, K.A., Logan, R., Nowak, E.
Published in IEEE transactions on electron devices (2000)
Published in IEEE transactions on electron devices (2000)
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Journal Article