Development and Characterization of Low Temperature Wafer-Level Vacuum Packaging Using Cu-Sn Bonding and Nanomultilayer Getter
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Published in Micromachines (Basel) (14.02.2023)
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Controlled adsorption of gas molecules by tuning porosity of titanium film
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Published in Smart materials and structures (01.03.2024)
Published in Smart materials and structures (01.03.2024)
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