Real-Time End-Point Detection Using Modified Principal Component Analysis for Small Open Area SiO2 Plasma Etching
Han, Kyounghoon, Yoon, En Sup, Lee, Jaewon, Chae, Heeyeop, Han, Kwang Hoon, Park, Kun Joo
Published in Industrial & engineering chemistry research (04.06.2008)
Published in Industrial & engineering chemistry research (04.06.2008)
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Journal Article
Manufacturing method of anti-bacterial handle and anti-bacterial handle manufactured thereby
KIM JAE HEUN, YANG JI SOO, CHOI KYU SEOK, HAN KWANG HOON, KIM YOUNG JU
Year of Publication 31.03.2021
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Year of Publication 31.03.2021
Patent