Vibrational frequencies of hydrogenated silicon carbonitride: A DFT study
Coustel, Romain, Haacké, Mathias, Rouessac, Vincent, André, Erwan, Roualdès, Stéphanie, Julbe, Anne
Published in Surface & coatings technology (25.09.2017)
Published in Surface & coatings technology (25.09.2017)
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Journal Article
An insight into the structure–property relationships of PECVD SiCxNy(O):H materials
Coustel, Romain, Haacké, Mathias, Rouessac, Vincent, Durand, Jean, Drobek, Martin, Julbe, Anne
Published in Microporous and mesoporous materials (01.06.2014)
Published in Microporous and mesoporous materials (01.06.2014)
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Journal Article
Microwave PECVD Silicon Carbonitride Thin Films: A FTIR and Ellipsoporosimetry Study
Haacké, Mathias, Coustel, Romain, Rouessac, Vincent, Roualdès, Stéphanie, Julbe, Anne
Published in Plasma processes and polymers (01.02.2016)
Published in Plasma processes and polymers (01.02.2016)
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Journal Article
Microwave PECVD Silicon Carbonitride Thin Films: A FTIR and Ellipsoporosimetry Study: Microwave PECVD Silicon Carbonitride Thin Films
Haacké, Mathias, Coustel, Romain, Rouessac, Vincent, Roualdès, Stéphanie, Julbe, Anne
Published in Plasma processes and polymers (01.02.2016)
Published in Plasma processes and polymers (01.02.2016)
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Journal Article