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Published in IEEE INFOCOM '99. Conference on Computer Communications. Proceedings. Eighteenth Annual Joint Conference of the IEEE Computer and Communications Societies. The Future is Now (Cat. No.99CH36320) (1999)
Published in IEEE INFOCOM '99. Conference on Computer Communications. Proceedings. Eighteenth Annual Joint Conference of the IEEE Computer and Communications Societies. The Future is Now (Cat. No.99CH36320) (1999)
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Year of Publication 04.06.2024
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Year of Publication 06.06.2023
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Year of Publication 24.10.2024
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PROCESSING CHAMBER DEPOSITION CONFINEMENT
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Year of Publication 28.04.2022
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Year of Publication 28.04.2022
Patent
CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
Khaja, Abdul Aziz, Prabhakar, Vinay, Balasubramanian, Ganesh, Ha, Sungwon, Wu, Fei
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Year of Publication 21.04.2022
Patent
Targeted heat control systems
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Year of Publication 07.03.2023
Patent
Pedestal for substrate processing chambers
Bobek, Sarah Michelle, Prabhakar, Vinay K, Parimi, Venkata Sharat Chandra, Kulshreshtha, Prashant Kumar, Li, Jian, Ha, Sungwon, Lee, Kwangduk Douglas
Year of Publication 21.02.2023
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Year of Publication 21.02.2023
Patent
DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
Ge, Zaoyuan, Khaja, Abdul Aziz, Ramamurthi, Badri N, Bobek, Sarah Michelle, Bansal, Amit, Ha, Sungwon, Xiong, Yin, Kulkarni, Ajit Laxman, Poomani, Prasath
Year of Publication 20.04.2023
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Year of Publication 20.04.2023
Patent