Search Results - "HYON JUN-JIN" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

by JIN, Yong Tak, SEO, Gyo Seong, HYON, Jun Jin, CHO, Joo Hyun
Year of Publication 14.03.2024

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Patent

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

by SEO GYO SEONG, CHO JOO HYUN, JIN YONG TAK, HYON JUN JIN
Year of Publication 12.03.2024

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Patent

SUBSTRATE PROCESSING APPARATUS AND OPERATING METHOD THEREFOR

SUBSTRATE PROCESSING APPARATUS AND OPERATING METHOD THEREFOR

by BAEK, Jin Wook, HYON, Jun Jin, KO, Hyeong Sik, LEE, Hyun No, YANG, Hyung Mo
Year of Publication 30.05.2024

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Patent

Substrate transfer device and method for determining abnormality of substrate transfer device

Substrate transfer device and method for determining abnormality of substrate transfer device

by SONG BYOUNG GYU, KO HYEONG SIK, HYON JUN JIN, BAE HYEONG HWAN, MIN JUNG KI
Year of Publication 11.10.2023

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Patent

WAFER TRANSFER DEVICE AND METHOD FOR JUDGING ABNORMALITIES OF WAFER TRANSFER DEVICE

WAFER TRANSFER DEVICE AND METHOD FOR JUDGING ABNORMALITIES OF WAFER TRANSFER DEVICE

by BAE, Hyeong Hwan, SONG, Byoung Gyu, HYON, Jun Jin, MIN, Jung Ki, KO, Hyeong Sik
Year of Publication 05.10.2023

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Patent

Substrate transfer device and substrate processing apparatus having the same

Substrate transfer device and substrate processing apparatus having the same

by SONG BYOUNG GYU, KO HYEONG SIK, BAE HYEONG HWAN, HYON JUN JIN
Year of Publication 19.10.2022

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Patent

Substrate processing apparatus and method for operating the same

Substrate processing apparatus and method for operating the same

by KO HYEONG SIK, HYON JUN JIN, BAEK JIN WOOK, YANG HYUNG MO, LEE HYUN NO
Year of Publication 30.05.2024

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Patent

FUME REMOVAL DEVICE AND SUBSTRATE TREATMENT DEVICE

FUME REMOVAL DEVICE AND SUBSTRATE TREATMENT DEVICE

by HYON, JUN-JIN
Year of Publication 27.03.2014

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Patent

APPARATUS AND METHOD FOR HEATING SUBSTRATE

APPARATUS AND METHOD FOR HEATING SUBSTRATE

by PARK, KUEN MIN, HYON, JUN JIN, KANG, CHUL GOO
Year of Publication 28.09.2016

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Patent

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

by HYON, JUN JIN, KO, HYEONG SIK, KANG, CHUL GOO
Year of Publication 18.01.2017

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Patent

MULTIPLE GASES PROVIDING METHOD AND MULTIPLE GASES PROVIDING APPARATUS

MULTIPLE GASES PROVIDING METHOD AND MULTIPLE GASES PROVIDING APPARATUS

by KANG, Chul-Goo, CHO, Joo-Hyun, MIN, Jung-Ki, KIM, Yong-Ki, HYON, Jun-Jin
Year of Publication 01.09.2016

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Patent

METHOD FOR MULTI-SUPPLYING GAS AND APPARATUS FOR MULTI-SUPPLYING GAS

METHOD FOR MULTI-SUPPLYING GAS AND APPARATUS FOR MULTI-SUPPLYING GAS

by KIM, YONG KI, HYON, JUN JIN, MIN, JUNG KI, CHO, JOO HYUN, KANG, CHUL GOO
Year of Publication 30.08.2016

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Patent

Substrate Processing Apparatus

Substrate Processing Apparatus

by KIM, YONG KI, SONG, BYOUNG GYU, KIM, KYOUNG HUN, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, JE, SUNG TAE, KIM, JAE WOO
Year of Publication 21.03.2017

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Patent

Substrate Processing Apparatus

Substrate Processing Apparatus

by KIM, YONG KI, SONG, BYOUNG GYU, KIM, KYOUNG HUN, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, JE, SUNG TAE, KIM, JAE WOO
Year of Publication 28.02.2017

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Patent

Apparatus for processing substrate and method for processing substrate using the same

Apparatus for processing substrate and method for processing substrate using the same

by KIM, YONG KI, SONG, BYOUNG GYU, KIM, KYOUNG HUN, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, JE, SUNG TAE, KIM, JAE WOO
Year of Publication 12.12.2016

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Patent

APPARATUS FOR PROCESSING SUBSTRATE WITH HEATER ADJUSTING PROCESS SPACE TEMPERATURE ACCORDING TO HEIGHT

APPARATUS FOR PROCESSING SUBSTRATE WITH HEATER ADJUSTING PROCESS SPACE TEMPERATURE ACCORDING TO HEIGHT

by KIM, YONG KI, SONG, BYOUNG GYU, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, KIM, KYONG HUN
Year of Publication 30.09.2015

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Patent

ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

by KIM, YONG KI, SONG, BYOUNG GYU, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, KIM, KYONG HUN
Year of Publication 21.08.2015

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Patent

SUBSTRATE PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TRANSFERRING METHOD

SUBSTRATE PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TRANSFERRING METHOD

by KIM KYONG-HUN, HYON JUN-JIN, SONG BYOUNG-GYU, KIM CHANG-DOL, KIM YONG-KI, SHIN YANG-SIK
Year of Publication 02.07.2015

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Patent

SUBSTRATE PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFERING METHOD INCLUDING THE SAME

SUBSTRATE PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFERING METHOD INCLUDING THE SAME

by KIM, YONG KI, SONG, BYOUNG GYU, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, KIM, KYONG HUN
Year of Publication 22.06.2015

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Patent

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE TREATMENT APPARATUS

by SONG, BYOUNG-GYU, KIM, KYONG-HUN, SHIN, YANG-SIK, HYON, JUN-JIN, KIM, CHANG DOL, KIM, YONG-KI
Year of Publication 23.04.2015

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Patent