가열식 샤워헤드 조립체를 갖는 기판 프로세싱 챔버
KURATOMI TAKASHI, HUSTON JOEL M, CHANG MEI, CHANG YU, WU DIEN YEH, YUAN XIAOXIONG, DAITO KAZUYA, CAO BIN, GUNGOR FARUK, GELATOS AVGERINOS V
Year of Publication 20.04.2020
Get full text
Year of Publication 20.04.2020
Patent
MODULAR CHEMICAL DELIVERY SYSTEM
KAO CHIEN TEH, HUSTON JOEL M, CHANG MEI, CHANG YU, CUVALCI OLKAN, LAM HYMAN W. H
Year of Publication 29.07.2015
Get full text
Year of Publication 29.07.2015
Patent
Substrate processing chamber having heated showerhead assembly
Chang, Mei, Kuratomi, Takashi, Cao, Bin, Huston, Joel M, Wu, Dien-Yeh, Yuan, Xiaoxiong, Gungor, Faruk, Chang, Yu, Daito, Kazuya, Gelatos, Avgerinos V
Year of Publication 07.03.2023
Get full text
Year of Publication 07.03.2023
Patent
High temperature process chamber lid
Chang, Mei, Huston, Joel M, Wu, Dien-Yeh, Kao, Chien-Teh, Durukan, Ilker
Year of Publication 29.12.2020
Get full text
Year of Publication 29.12.2020
Patent