확산 장벽 형성을 위한 방법 및 습식 화학 조성물
WILKINS TAYLOR L, NAJJAR ELIE H, SUN SHAOPENG, SHAO WENBO, HURTUBISE RICHARD W, YARKOBSON ERIC
Year of Publication 26.09.2023
Get full text
Year of Publication 26.09.2023
Patent
COPPER ELECTRODEPOSITION IN MICROELECTRONICS
WHITTEN KYLE, ROUYA ERIC, PANECCASIO VINCENT, HURTUBISE RICHARD, COMMANDER JOHN
Year of Publication 21.06.2021
Get full text
Year of Publication 21.06.2021
Patent
마이크로전자장치에서의 구리 전착
WHITTEN KYLE, ROUYA ERIC, PANECCASIO VINCENT, HURTUBISE RICHARD, COMMANDER JOHN
Year of Publication 24.05.2019
Get full text
Year of Publication 24.05.2019
Patent
집적 회로의 웨이퍼 레벨 패키징에서의 구리 침착
WHITTEN KYLE, PANECCASIO VINCENT JR, HURTUBISE RICHARD, COMMANDER JOHN, RICHARDSON THOMAS
Year of Publication 10.07.2019
Get full text
Year of Publication 10.07.2019
Patent
ELECTRODEPOSITION OF COPPER
WHITTEN KYLE, ROUYA ERIC, PANECCASIO VINCENT, HURTUBISE RICHARD, COMMANDER JOHN
Year of Publication 29.07.2016
Get full text
Year of Publication 29.07.2016
Patent
Copper electrodeposition in microelectronics
Paneccasio, Jr., Vincent, Lin, Xuan, Hurtubise, Richard, Figura, Paul
Year of Publication 06.09.2022
Get full text
Year of Publication 06.09.2022
Patent
Copper Electrodeposition in Microelectronics
Commander, John, Rouya, Eric, Whitten, Kyle, Paneccasio, JR., Vincent, Hurtubise, Richard
Year of Publication 18.01.2024
Get full text
Year of Publication 18.01.2024
Patent
Method and Wet Chemical Compositions for Diffusion Barrier Formation
Najjar, Elie H, Wilkins, Taylor L, Shao, Wenbo, Yakobson, Eric, Sun, Shaopeng, Hurtubise, Richard W
Year of Publication 21.12.2023
Get full text
Year of Publication 21.12.2023
Patent
Method and wet chemical compositions for diffusion barrier formation
Najjar, Elie H, Wilkins, Taylor L, Shao, Wenbo, Yakobson, Eric, Sun, Shaopeng, Hurtubise, Richard W
Year of Publication 19.12.2023
Get full text
Year of Publication 19.12.2023
Patent
METHOD AND WET CHEMICAL COMPOSITIONS FOR DIFFUSION BARRIER FORMATION
YARKOBSON, Eric, WILKINS, Taylor, L, NAJJAR, Elie, H, HURTUBISE, Richard, W, SUN, Shaopeng, SHAO, Wenbo
Year of Publication 13.12.2023
Get full text
Year of Publication 13.12.2023
Patent
COPPER METALLIZATION OF THROUGH SILICON VIA
ZHANG YUN, LIN XUAN, WANG CHEN, PANECCASIO VINCENT, WANG CAI, HURTUBISE RICHARD, RICHARDSON THOMAS B, ABYS JOSEPH A
Year of Publication 26.05.2010
Get full text
Year of Publication 26.05.2010
Patent
Copper deposition in wafer level packaging of integrated circuits
Commander, John, Whitten, Kyle, Paneccasio, Jr., Vincent, Richardson, Thomas, Hurtubise, Richard
Year of Publication 11.07.2023
Get full text
Year of Publication 11.07.2023
Patent
Effect of Co(III) on Defectivity of Electroless Cobalt Capping Layers on Damascene Copper Interconnects
Chen, Qingyun, Valverde, Charles, Figura, Paul, Paneccasio, Vincent, Stritch, Daniel, Hurtubise, Richard, Witt, Christian, Fang, Hongbin, Weidman, Timothy, Shanmugasundram, Arulkumar
Published in ECS transactions (07.02.2007)
Published in ECS transactions (07.02.2007)
Get full text
Journal Article
Method and Wet Chemical Compositions for Diffusion Barrier Formation
Najjar, Elie H, Wilkins, Taylor L, Shao, Wenbo, Yakobson, Eric, Sun, Shaopeng, Hurtubise, Richard W
Year of Publication 18.08.2022
Get full text
Year of Publication 18.08.2022
Patent
METHOD AND WET CHEMICAL COMPOSITIONS FOR DIFFUSION BARRIER FORMATION
YARKOBSON, Eric, SUN, Shaopeng, NAJJAR, Elie, WILKINS, Taylor, SHAO, Wenbo, HURTUBISE, Richard
Year of Publication 11.08.2022
Get full text
Year of Publication 11.08.2022
Patent
COPPER ELECTRODEPOSITION IN MICROELECTRONICS
PANECCASIO, Vincent, WHITTEN, Kyle, COMMANDER, John, HURTUBISE, Richard, ROUYA, Eric
Year of Publication 21.10.2020
Get full text
Year of Publication 21.10.2020
Patent
Understanding the Initiation and Growth Variations of Electroless Cobalt Capping Layers at Different Features on Damascene Copper Interconnects
Chen, Qingyun, Valverde, Charles, Petrov, Nicolai, Stritch, Daniel, Hurtubise, Richard, Witt, Christian
Published in ECS transactions (07.02.2007)
Published in ECS transactions (07.02.2007)
Get full text
Journal Article