H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
SCHMIDT, H. F, MEURIS, M, MERTENS, P. W, ROTONDARO, A. L. P, HEYNS, M. M, HURD, T. Q, HATCHER, Z
Published in Japanese journal of applied physics (1995)
Published in Japanese journal of applied physics (1995)
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Conference Proceeding
CONTAMINATION CONTROL FOR EMBEDDED FERROELECTRIC DEVICE FABRICATION PROCESSES
HURD TRACE Q, SUMMERFELT SCOTT, COLOMBO LUIGI, MIRKARIMI LAURA W, GILBERT STEPHEN R
Year of Publication 19.02.2003
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Year of Publication 19.02.2003
Patent
Study of Cu Bimetallic Corrosion in CMP Chemical Environments Using Optical Scanning and Micropattern Corrosion Screening
Yu, Kyle, Thomas, Nicole, Venkataraman, Shyam S., Pillai, Karthikeyan S., Hurd, Trace, Boggs, Karl, Chyan, Oliver
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
SEMICONDUCTOR DEVICE WITH GATE-UNDERCUTTING RECESSED REGION
HURD TRACE Q, KOONTZ ELISABETH MARLEY, ROTONDARO ANTONIO LUIS PACHECO
Year of Publication 29.12.2011
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Year of Publication 29.12.2011
Patent
SEMICONDUCTOR DEVICE WITH GATE-UNDERCUTTING RECESSED REGION
HURD TRACE Q, PACHECO ROTONDARO ANTONIO LUIS, KOONTZ ELISABETH MARLEY
Year of Publication 29.12.2011
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Year of Publication 29.12.2011
Patent
Semiconductor device with gate-undercutting recessed region
HURD TRACE Q, PACHECO ROTONDARO ANTONIO LUIS, KOONTZ ELISABETH MARLEY
Year of Publication 01.11.2011
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Year of Publication 01.11.2011
Patent
Semiconductor device with gate-undercutting recessed region
Pacheco Rotondaro, Antonio Luis, Hurd, Trace Q, Koontz, Elisabeth Marley
Year of Publication 01.11.2011
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Year of Publication 01.11.2011
Patent
SEMICONDUCTOR DEVICE WITH GATE-UNDERCUTTING RECESSED REGION
HURD TRACE Q, PACHECO ROTONDARO ANTONIO LUIS, KOONTZ ELISABETH MARLEY
Year of Publication 09.07.2009
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Year of Publication 09.07.2009
Patent
Crystallographic preferential etch to define a recessed-region for epitaxial growth
HURD TRACE Q, KOONTZ ELISABETH MARLEY, ROTONDARO ANTONIO LUIS PACHECO
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
Patent
Crystallographic preferential etch to define a recessed-region for epitaxial growth
Rotondaro, Antonio Luis Pacheco, Hurd, Trace Q, Koontz, Elisabeth Marley
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
Patent
H 2 O 2 Decomposition and Its Impact on Silicon Surface Roughening and Gate Oxide Integrity
Schmidt, Harald F., Meuris, Marc, Mertens, Paul W., Rotondaro, Antonio L. P., Heyns, Marc M., Hurd, Trace Q., Hatcher, Zach
Published in Japanese Journal of Applied Physics (01.02.1995)
Published in Japanese Journal of Applied Physics (01.02.1995)
Get full text
Journal Article