A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices
Loubet, N., Kal, S., Alix, C., Pancharatnam, S., Zhou, H., Durfee, C., Belyansky, M., Haller, N., Watanabe, K., Devarajan, T., Zhang, J., Miao, X., Sankar, M., Breton, M., Chao, R., Greene, A., Yu, L., Frougier, J., Chanemougame, D., Tapily, K., Smith, J., Basker, V., Mosden, A., Biolsi, P., Hurd, T. Q., Divakaruni, R., Haran, B., Bu, H.
Published in 2019 IEEE International Electron Devices Meeting (IEDM) (01.12.2019)
Published in 2019 IEEE International Electron Devices Meeting (IEDM) (01.12.2019)
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Conference Proceeding
Impact of Fe and Cu contamination on the minority carrier lifetime of silicon substrates
ROTONDARO, A. L. P, HURD, T. Q, KANIAVA, A, VANHELLEMONT, J, SIMOEN, E, HEYNS, M. M, CLAEYS, C, BROWN, G
Published in Journal of the Electrochemical Society (01.09.1996)
Published in Journal of the Electrochemical Society (01.09.1996)
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Journal Article
(Invited) Wet Etching inside Advanced High Aspect Ratio Structures: Impact of Dissolved Oxygen
Sakazaki, Tetsuya, Kosugi, Hitoshi, Bassett, Derek W, Simms, Ihsan, Rotondaro, Antonio, Hurd, Trace
Published in ECS transactions (03.07.2019)
Published in ECS transactions (03.07.2019)
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Journal Article
Diffusion studies of copper on ruthenium thin film a plateable copper diffusion barrier
Chan, R, Arunagiri, T N, Zhang, Y, Chyan, O, Wallace, R M, Kim, M J, Kur, T Q
Published in Electrochemical and solid-state letters (01.01.2004)
Published in Electrochemical and solid-state letters (01.01.2004)
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Journal Article
Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems
Banks, J.C., Doyle, B.L., Knapp, J.A., Werho, D., Gregory, R.B., Anthony, M., Hurd, T.Q., Diebold, A.C.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1998)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1998)
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Journal Article
H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
SCHMIDT, H. F, MEURIS, M, MERTENS, P. W, ROTONDARO, A. L. P, HEYNS, M. M, HURD, T. Q, HATCHER, Z
Published in Japanese journal of applied physics (1995)
Published in Japanese journal of applied physics (1995)
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Conference Proceeding
A novel BST storage capacitor node technology using platinum electrodes for Gbit DRAMs
Khamankar, R.B., Kressley, M.A., Visokay, M.R., Moise, T., Xing, G., Nemoto, S., Okumo, Y., Fang, S.J., Wilson, A.M., Gaynor, J.F., Hurd, T.Q., Crenshaw, D.L., Summerfelt, S., Colombo, L.
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
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Conference Proceeding
Diffusion Studies of Copper on Ruthenium Thin Film
Chan, R., Arunagiri, T. N., Zhang, Y., Chyan, O., Wallace, R. M., Kim, M. J., Hurd, T. Q.
Published in Electrochemical and solid-state letters (2004)
Published in Electrochemical and solid-state letters (2004)
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Journal Article